Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====MLA Maintenance 6/24-6/27===== |
| + | The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the |
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| − | PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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| + | evenings. |
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| − | This will be an all day event starting at 8:00am. |
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| + | -Lee |
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| − | Please plan accordingly. |
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| + | //15:59, 4 June 2024 (PDT) |
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| − | This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 15:18, 12 October 2023 (PDT) |
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| − | =====Raith Velion - Velion repair - status update===== |
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| − | The new stage motor is now onsite and a Raith field service engineer will install it on Wednesday. I expect the tool will be returned to users on Friday, I'll update again if anything changes. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 12:17, 11 October 2023 (PDT) |
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| − | =====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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| − | Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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| − | Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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| − | Please plan your process accordingly. |
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| − | Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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| − | ===== |
+ | =====EBeam4 is up===== |
| + | EBeam4 is back up. |
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| − | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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| + | |||
| − | //[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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| + | The overnight regen of the cryo was completed this morning. |
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| + | I then tested the operation of the hoist numerous times without issue. |
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| + | I tested the EBeam by running 200A of Ti without issue. |
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| + | |||
| + | System UP |
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| + | |||
| + | //10:36, 30 May 2024 (PDT) |
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| + | |||
| + | =====Stepper #1 (GCA 6300) - Tool availability===== |
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| + | Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: |
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| + | |||
| + | 6-18-24 at 8:00am |
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| + | Till |
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| + | 6-20-24 at 5:00pm |
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| + | |||
| + | Please plan your processing activities accordingly. |
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| + | //13:32, 1 June 2024 (PDT) |
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| + | |||
| + | =====Stepper #2 (GCA Autostep 200) - Tool availability===== |
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| + | Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: |
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| + | |||
| + | 6-21-24 at 8:00am |
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| + | Till |
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| + | 6-21-24 at 5:00pm |
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| + | |||
| + | Please plan your processing activities accordingly. |
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| + | |||
| + | Thanks |
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| + | Bill Millerski |
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| + | UCSB |
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| + | //13:32, 1 June 2024 (PDT) |
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| + | |||
| + | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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| + | We have finished calibrations, |
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| + | System is up. |
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| + | |||
| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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| + | |||
| + | =====Unaxis VLR still Down===== |
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| + | |||
| + | The chiller has a decent sized ball of ice inside of it. |
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| + | |||
| + | I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. |
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| + | //13:29, 1 June 2024 (PDT) |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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| + | |||
| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| + | |||
| + | =====MA6 TSA is down - Update===== |
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| + | Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience. |
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| + | |||
| + | Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools: |
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| + | |||
| + | https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication |
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| − | ===== Dicing Saw Upgrade - Update===== |
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| − | The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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-Lee |
-Lee |
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| − | // |
+ | //15:59, 22 May 2024 (PDT) |
| − | =====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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| − | The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT) |
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| − | ===== |
+ | =====Velion FIB Tool DOWN===== |
| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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| + | |||
| − | (1) 09-30-23 8:00am-5:00pm |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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| − | (2) 10-01-23 8:00am-5:00pm |
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| + | |||
| − | (3) 10-02-23 8:00am-12:00pm |
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| + | =====ICP1 Down===== |
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| − | Please plan your work activities accordingly. |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | |||
| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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| − | ===== EVG is down===== |
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| − | We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT) |
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Latest revision as of 15:59, 4 June 2024
MLA Maintenance 6/24-6/27
The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the evenings. -Lee //15:59, 4 June 2024 (PDT)
EBeam4 is up
EBeam4 is back up.
The overnight regen of the cryo was completed this morning. I then tested the operation of the hoist numerous times without issue. I tested the EBeam by running 200A of Ti without issue.
System UP
//10:36, 30 May 2024 (PDT)
Stepper #1 (GCA 6300) - Tool availability
Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:
6-18-24 at 8:00am Till 6-20-24 at 5:00pm
Please plan your processing activities accordingly. //13:32, 1 June 2024 (PDT)
Stepper #2 (GCA Autostep 200) - Tool availability
Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:
6-21-24 at 8:00am Till 6-21-24 at 5:00pm
Please plan your processing activities accordingly.
Thanks Bill Millerski UCSB //13:32, 1 June 2024 (PDT)
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. //Vraj Mehalana 11:17, 24 May 2024 (PDT)
Unaxis VLR still Down
The chiller has a decent sized ball of ice inside of it.
I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. //13:29, 1 June 2024 (PDT)
//Vraj Mehalana 11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.
Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:
https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)