Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
| + | We have finished calibrations, |
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| − | PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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| + | System is up. |
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| − | This will be an all day event starting at 8:00am. |
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| − | Please plan accordingly. |
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| − | This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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| − | =====Raith Velion - Tool Up===== |
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| − | The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am. - Dan |
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| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | =====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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| − | Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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| − | Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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| − | Please plan your process accordingly. |
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| − | Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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| ⚫ | |||
| + | //11:17, 24 May 2024 (PDT) |
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| + | |||
| − | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| ⚫ | |||
| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| + | |||
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| + | |||
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| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| + | |||
| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| − | ===== Dicing Saw Upgrade - Update===== |
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| − | The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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-Lee |
-Lee |
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| − | // |
+ | //15:59, 22 May 2024 (PDT) |
| − | =====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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| − | The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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| ⚫ | |||
| − | ===== |
+ | =====Velion FIB Tool DOWN===== |
| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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| + | |||
| − | (1) 09-30-23 8:00am-5:00pm |
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| ⚫ | |||
| − | (2) 10-01-23 8:00am-5:00pm |
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| + | |||
| − | (3) 10-02-23 8:00am-12:00pm |
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| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| − | Please plan your work activities accordingly. |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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| + | |||
| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| + | |||
| + | Sorry for the inconvenience. |
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| + | |||
| ⚫ | |||
| + | |||
| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| ⚫ | |||
| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | |||
| ⚫ | |||
| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| − | We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT) |
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Latest revision as of 11:17, 24 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)