Template:Announcements: Difference between revisions

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=====PECVD2 Planned Down Time for Maintenance 10-19-23=====
=====EBL Move-In: Tues 9-11a=====
Users,
PECVD2 will be going down on Thursday October 19th for replacement of the hoist.
This will be an all day event starting at 8:00am.
Please plan accordingly.
This was originally planned for 10-2, but we had to reschedule due to other equipment down


Thank you for your patience while we moved the new EBL system in.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 15:18, 12 October 2023 (PDT)
=====Raith Velion - Tool Up=====
The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am.


The lab is fully open for use.
- Dan


Peder Lenvik
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:12, 13 October 2023 (PDT)
=====Unaxis ICP-PECVD is UP for Non-GapFill=====
Sr. Facilities Lead
Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available.
// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC)
Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run.
Please plan your process accordingly.
Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed.


⚫
=====MLA150 is UP=====
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT)
System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week.
⚫
-Lee
//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC)


=====Wafer Bonder, (Suss SB6-8E)=====
=====Stepper #3 (ASML DUV) - Maint Complete =====
ASML Maintenance is complete, the system is up.
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.
// [[User:John_d|Demis D. John]] 02:18, 7 March 2025 (UTC)


=====RIE #5 Down: Mon March 13th =====
//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT)
RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.


If we complete the job early we will send a follow-up email releasing the system.
===== Dicing Saw Upgrade - Update=====
The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule.


⚫
//[[User:Mehalana v|Vraj Mehalana]] 09:46, 21 February 2025 (UTC)
⚫
-Lee


=====New Gowns: Toolbelts purchases=====
//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT)
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
=====Stepper #1 (GCA 6300) Scheduled Maintenance=====
The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date.


Two vendors for cleanroom belts we are using are listed here, you may request others:
//[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT)
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance=====

The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times:
=====Suss SB6-8E=====
(1) 09-30-23 8:00am-5:00pm
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
(2) 10-01-23 8:00am-5:00pm

(3) 10-02-23 8:00am-12:00pm
I will send out an update once we have one.
Please plan your work activities accordingly.
-Aidan
//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT)
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


⚫
===== EVG is down=====
We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee
//[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT)
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Latest revision as of 19:15, 11 March 2025

EBL Move-In: Tues 9-11a

Users,

Thank you for your patience while we moved the new EBL system in.

The lab is fully open for use.

Peder Lenvik

Sr. Facilities Lead // Demis D. John 23:47, 10 March 2025 (UTC)

MLA150 is UP

System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. -Lee //Demis D. John 20:51, 7 March 2025 (UTC)

Stepper #3 (ASML DUV) - Maint Complete

ASML Maintenance is complete, the system is up. // Demis D. John 02:18, 7 March 2025 (UTC)

RIE #5 Down: Mon March 13th

RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.

If we complete the job early we will send a follow-up email releasing the system.

//Vraj Mehalana 09:46, 21 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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