Template:Announcements: Difference between revisions

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=====PECVD2 Planned Down Time for Maintenance 10-19-23=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
PECVD2 will be going down on Thursday October 19th for replacement of the hoist.
-- Tony
This will be an all day event starting at 8:00am.
⚫
Please plan accordingly.
This was originally planned for 10-2, but we had to reschedule due to other equipment down


//[[User:Mehalana v|Vraj Mehalana]] 15:18, 12 October 2023 (PDT)
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
=====Raith Velion - Tool Up=====
The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am.


=====Olympus DSX Microscope: Down=====
- Dan
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
-- Tony Bosch
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:12, 13 October 2023 (PDT)
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
=====Unaxis ICP-PECVD is UP for Non-GapFill=====
⚫
Please plan your work accordingly.
Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available.
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)
Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run.
Please plan your process accordingly.
Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed.


=====ICP #2 Maint: Complete=====
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT)


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
⚫
=====Wafer Bonder, (Suss SB6-8E)=====
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.


//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT)
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)


===== Dicing Saw Upgrade - Update=====
=====Oxford ALD+Ion Mill: UP=====
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
-Lee


Please use the original tool name on SUM to make all future tool reservations.
//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT)
=====Stepper #1 (GCA 6300) Scheduled Maintenance=====
The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date.


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
//[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT)


Please feel free to email me directly with any questions you may have.
=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance=====
The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times:
(1) 09-30-23 8:00am-5:00pm
(2) 10-01-23 8:00am-5:00pm
(3) 10-02-23 8:00am-12:00pm
Please plan your work activities accordingly.


Thanks
//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT)
Bill Millerski
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


===== EVG is down=====
=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next
week and will update everyone at that time.


Two vendors for cleanroom belts we are using are listed here, you may request others:
-Lee
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]

// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

⚫
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


//[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT)
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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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