Template:Announcements: Difference between revisions
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===== SEM#1 update===== |
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The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan |
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We will be taking the system back down on Monday to evaluate the hoist. |
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// [[User:John_d|Demis D. John]] 21:49, 28 May 2025 (UTC) |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!===== |
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We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. |
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=====ProbeStation scheduled IT maintenance===== |
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// [[User:Mehalana v|Vraj Mehalana]] 21:48, 21 May 2025 (UTC) |
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The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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* 10-30-23 |
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* 10-31-23 |
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Please plan your work activities accordingly. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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This will be an all day event starting at 8:00am. |
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Please plan accordingly. |
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This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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//[[User:Mehalana v|Vraj Mehalana]] 15:18, 12 October 2023 (PDT) |
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=====Raith Velion - Tool Up===== |
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The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am. |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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- Dan |
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-- Vraj |
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//[[User:Mehalana v|Vraj Mehalana]] 10:12, 13 October 2023 (PDT) |
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// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC) |
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=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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=====New Gowns: Toolbelts purchases===== |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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//[[User: |
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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I will send out an update once we have one. |
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-Lee |
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-Aidan |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT) |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT) |
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=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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(1) 09-30-23 8:00am-5:00pm |
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(2) 10-01-23 8:00am-5:00pm |
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(3) 10-02-23 8:00am-12:00pm |
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Please plan your work activities accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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EVG finally has our PO. They are scheduled to be here next week, my guess would be Tuesday. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 18 October 2023 (PDT) |
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Latest revision as of 22:24, 28 May 2025
SEM#1 update
The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan // Demis D. John 21:49, 28 May 2025 (UTC)
Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!
We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. // Vraj Mehalana 21:48, 21 May 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)