Difference between revisions of "Template:Announcements"
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| − | =====ProbeStation scheduled IT maintenance===== |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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| − | * 10-30-23 |
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| − | * 10-31-23 |
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| − | Please plan your work activities accordingly. |
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| − | Initially it was planned to remove the hoist again to rebuild it to solve the leak. |
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| − | The manufacturer is sending out a rebuild kit under warranty since it is a brand new hoist that is leaking. |
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| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| − | When that arrives I will schedule another all day event to rebuild the hoist. |
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| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| − | I cleaned up the leaked oil, checked oil level, and did an inspection of the tool. |
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| − | System is back up and available for use. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 11:11, 23 October 2023 (PDT) |
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| − | =====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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| − | Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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| − | Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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| − | Please plan your process accordingly. |
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| − | Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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| + | //15:59, 22 May 2024 (PDT) |
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| − | ===== |
+ | =====Velion FIB Tool DOWN===== |
| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| − | ===== Dicing Saw Upgrade - Update===== |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| − | The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| + | Sorry for the inconvenience. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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| − | EVG finally has our PO. They are scheduled to be here next week, my guess would be Tuesday. |
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| − | -Lee |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //10:54, 23 May 2024 (PDT) |
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| + | =====Wafer Bonder, (Suss SB6-8E)===== |
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| + | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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Latest revision as of 10:55, 23 May 2024
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)