Template:Announcements: Difference between revisions
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(Raith EBL update) |
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===== Raith EBL Update ===== |
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Unfortunately the fix discussed in the last update turned out to be a good news/bad news thing. The good news is that the majority of the field distortion problem we have experienced since the install has been addressed. However the bad news is that there is still a residual settling effect that is distorting the field in one part of the field only and prevents the tool from fully meeting specifications. So it turned out to a layers of an onion kind of thing – because of course it did. |
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The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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* 10-30-23 |
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* 10-31-23 |
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Please plan your work activities accordingly. |
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So the suspect now is the fine focus coil in the column (one of the factory engineers predicted stitch shifts when a faulty fine focus coil is present which essentially replicated the errors we are now seeing) and the question now is how to get one of these sent to UCSB. They are a factory install item so for us to get one, and one that has been tested and confirmed to be fully operational, would require it to be taken from a tool currently under fabrication on the production line. |
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Initially it was planned to remove the hoist again to rebuild it to solve the leak. |
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We are close, very close, but still not quite there. And I am really sorry that is still the case… |
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The manufacturer is sending out a rebuild kit under warranty since it is a brand new hoist that is leaking. |
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-Bill |
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When that arrives I will schedule another all day event to rebuild the hoist. |
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// [[User:John_d|Demis D. John]] 22:53, 13 June 2025 (UTC) |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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I cleaned up the leaked oil, checked oil level, and did an inspection of the tool. |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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System is back up and available for use. |
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//[[User:Mehalana v|Vraj Mehalana]] 11:11, 23 October 2023 (PDT) |
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=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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-- Vraj |
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//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC) |
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=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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I will send out an update once we have one. |
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-Lee |
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-Aidan |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT) |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====EVG Activation: Up===== |
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The FSE has completed the work on the tool and I have made several test runs without issue. |
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IMPORTANT - Please see corresponding email for changes in operation. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT) |
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Latest revision as of 22:53, 13 June 2025
Raith EBL Update
Unfortunately the fix discussed in the last update turned out to be a good news/bad news thing. The good news is that the majority of the field distortion problem we have experienced since the install has been addressed. However the bad news is that there is still a residual settling effect that is distorting the field in one part of the field only and prevents the tool from fully meeting specifications. So it turned out to a layers of an onion kind of thing – because of course it did.
So the suspect now is the fine focus coil in the column (one of the factory engineers predicted stitch shifts when a faulty fine focus coil is present which essentially replicated the errors we are now seeing) and the question now is how to get one of these sent to UCSB. They are a factory install item so for us to get one, and one that has been tested and confirmed to be fully operational, would require it to be taken from a tool currently under fabrication on the production line.
We are close, very close, but still not quite there. And I am really sorry that is still the case… -Bill // Demis D. John 22:53, 13 June 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)