Difference between revisions of "Template:Announcements"
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+ | =====MLA Maintenance 6/24-6/27===== |
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+ | The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the |
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+ | evenings. |
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+ | -Lee |
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+ | //15:59, 4 June 2024 (PDT) |
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− | ===== |
+ | =====EBeam4 is up===== |
+ | EBeam4 is back up. |
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− | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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− | //[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT) |
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+ | The overnight regen of the cryo was completed this morning. |
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− | =====EBeam2 UP===== |
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+ | I then tested the operation of the hoist numerous times without issue. |
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− | Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure. |
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+ | I tested the EBeam by running 200A of Ti without issue. |
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+ | System UP |
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− | //[[User:Mehalana v|Vraj Mehalana]] 11:48, 26 October 2023 (PDT) |
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− | =====ProbeStation scheduled IT maintenance===== |
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− | The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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− | * 10-30-23 |
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− | * 10-31-23 |
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− | * 11-01-23 |
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− | * 11-02-23 |
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− | Please plan your work activities accordingly. |
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− | // |
+ | //10:36, 30 May 2024 (PDT) |
− | ===== |
+ | =====Stepper #1 (GCA 6300) - Tool availability===== |
+ | Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: |
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− | We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again. |
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− | //[[User:Mehalana v|Vraj Mehalana]] 16:48, 31 October 2023 (PDT) |
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− | =====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am===== |
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− | We are still working on an improved GapFill recipe. |
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+ | 6-18-24 at 8:00am |
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− | To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run, |
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+ | Till |
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+ | 6-20-24 at 5:00pm |
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+ | Please plan your processing activities accordingly. |
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− | - starting Monday Oct 30th, evening at 5pm, |
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+ | //13:32, 1 June 2024 (PDT) |
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+ | =====Stepper #2 (GCA Autostep 200) - Tool availability===== |
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− | - ending Wed Nov 1st, morning at 6am. |
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+ | Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: |
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+ | 6-21-24 at 8:00am |
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− | Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME. |
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+ | Till |
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+ | 6-21-24 at 5:00pm |
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+ | Please plan your processing activities accordingly. |
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− | Let me know if you have any questions. |
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+ | Thanks |
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− | //[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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+ | Bill Millerski |
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+ | UCSB |
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+ | //13:32, 1 June 2024 (PDT) |
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− | ===== |
+ | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
+ | We have finished calibrations, |
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− | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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+ | System is up. |
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+ | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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− | //[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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+ | //[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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− | ===== |
+ | =====Unaxis VLR still Down===== |
− | The FSE has completed the work on the tool and I have made several test runs without issue. |
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+ | The chiller has a decent sized ball of ice inside of it. |
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− | IMPORTANT - Please see corresponding email for changes in operation. |
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+ | |||
+ | I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. |
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+ | //13:29, 1 June 2024 (PDT) |
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+ | |||
+ | //[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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+ | |||
+ | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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+ | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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+ | |||
+ | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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+ | |||
+ | =====MA6 TSA is down - Update===== |
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+ | Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience. |
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+ | |||
+ | Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools: |
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+ | |||
+ | https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication |
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+ | |||
+ | -Lee |
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+ | //15:59, 22 May 2024 (PDT) |
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+ | |||
+ | =====Velion FIB Tool DOWN===== |
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+ | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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+ | |||
+ | //[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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+ | |||
+ | =====ICP1 Down===== |
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+ | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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+ | //[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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+ | |||
+ | =====Lab Access Changes: Symmetry App===== |
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+ | The iris scanner has been decommissioned. Please use the card reader which supports: |
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+ | |||
+ | -Physical card |
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+ | |||
+ | -Mobile phone via Symmetry App |
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+ | |||
+ | //10:54, 23 May 2024 (PDT) |
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+ | |||
+ | =====Wafer Bonder, (Suss SB6-8E)===== |
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+ | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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+ | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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− | //[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT) |
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Latest revision as of 15:59, 4 June 2024
MLA Maintenance 6/24-6/27
The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the evenings. -Lee //15:59, 4 June 2024 (PDT)
EBeam4 is up
EBeam4 is back up.
The overnight regen of the cryo was completed this morning. I then tested the operation of the hoist numerous times without issue. I tested the EBeam by running 200A of Ti without issue.
System UP
//10:36, 30 May 2024 (PDT)
Stepper #1 (GCA 6300) - Tool availability
Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:
6-18-24 at 8:00am Till 6-20-24 at 5:00pm
Please plan your processing activities accordingly. //13:32, 1 June 2024 (PDT)
Stepper #2 (GCA Autostep 200) - Tool availability
Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:
6-21-24 at 8:00am Till 6-21-24 at 5:00pm
Please plan your processing activities accordingly.
Thanks Bill Millerski UCSB //13:32, 1 June 2024 (PDT)
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. //Vraj Mehalana 11:17, 24 May 2024 (PDT)
Unaxis VLR still Down
The chiller has a decent sized ball of ice inside of it.
I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. //13:29, 1 June 2024 (PDT)
//Vraj Mehalana 11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.
Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:
https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)