Template:Announcements: Difference between revisions

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=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
-- Tony


//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
=====Job Opening: Process Engineer=====
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)


=====EBeam2 UP=====
=====Olympus DSX Microscope: Down=====
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure.
-- Tony Bosch
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
//[[User:Mehalana v|Vraj Mehalana]] 11:48, 26 October 2023 (PDT)
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
=====ProbeStation scheduled IT maintenance=====
⚫
Please plan your work accordingly.
The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates :
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)
* 10-30-23
* 10-31-23
* 11-01-23
* 11-02-23
⚫
Please plan your work activities accordingly.


=====ICP #2 Maint: Complete=====
//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
⚫
=====PECVD2 is down=====
We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again.
//[[User:Mehalana v|Vraj Mehalana]] 16:48, 31 October 2023 (PDT)


//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)
=====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am=====
We are still working on an improved GapFill recipe.


=====Oxford ALD+Ion Mill: UP=====
To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run,
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
- starting Monday Oct 30th, evening at 5pm,


Please use the original tool name on SUM to make all future tool reservations.
- ending Wed Nov 1st, morning at 6am.


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME.


Let me know if you have any questions.
Please feel free to email me directly with any questions you may have.


Thanks
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT)
Bill Millerski
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


=====Wafer Bonder, (Suss SB6-8E)=====
=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.


Two vendors for cleanroom belts we are using are listed here, you may request others:
//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT)
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
=====EVG Activation: Up=====
The FSE has completed the work on the tool and I have made several test runs without issue.


=====Suss SB6-8E=====
IMPORTANT - Please see corresponding email for changes in operation.
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT)
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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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