Template:Announcements: Difference between revisions

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=====EBL Move-In: Tues 9-11a=====
Users,


Thank you for your patience while we moved the new EBL system in.
=====Job Opening: Process Engineer=====
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)


The lab is fully open for use.
⚫
=====EBeam2 UP=====
Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure.


Peder Lenvik
⚫
//[[User:Mehalana v|Vraj Mehalana]] 11:48, 26 October 2023 (PDT)
=====ProbeStation scheduled IT maintenance=====
Sr. Facilities Lead
The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates :
// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC)
* 10-30-23
* 10-31-23
* 11-01-23
* 11-02-23
Please plan your work activities accordingly.


⚫
=====MLA150 is UP=====
//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)
System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week.
-Lee
//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC)


=====PECVD2 is down=====
=====Stepper #3 (ASML DUV) - Maint Complete =====
ASML Maintenance is complete, the system is up.
We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again.
//[[User:Mehalana v|Vraj Mehalana]] 16:48, 31 October 2023 (PDT)
// [[User:John_d|Demis D. John]] 02:18, 7 March 2025 (UTC)


=====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am=====
=====RIE #5 Down: Mon March 13th =====
RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.
We are still working on an improved GapFill recipe.


If we complete the job early we will send a follow-up email releasing the system.
To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run,


⚫
//[[User:Mehalana v|Vraj Mehalana]] 09:46, 21 February 2025 (UTC)
- starting Monday Oct 30th, evening at 5pm,


=====New Gowns: Toolbelts purchases=====
- ending Wed Nov 1st, morning at 6am.
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.


Two vendors for cleanroom belts we are using are listed here, you may request others:
Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME.
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
Let me know if you have any questions.


⚫
=====Suss SB6-8E=====
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT)
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.


I will send out an update once we have one.
⚫
=====Wafer Bonder, (Suss SB6-8E)=====
-Aidan
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT)
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


=====EVG Activation: Up=====
The FSE has completed the work on the tool and I have made several test runs without issue.

IMPORTANT - Please see corresponding email for changes in operation.

//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT)
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Latest revision as of 19:15, 11 March 2025

EBL Move-In: Tues 9-11a

Users,

Thank you for your patience while we moved the new EBL system in.

The lab is fully open for use.

Peder Lenvik

Sr. Facilities Lead // Demis D. John 23:47, 10 March 2025 (UTC)

MLA150 is UP

System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. -Lee //Demis D. John 20:51, 7 March 2025 (UTC)

Stepper #3 (ASML DUV) - Maint Complete

ASML Maintenance is complete, the system is up. // Demis D. John 02:18, 7 March 2025 (UTC)

RIE #5 Down: Mon March 13th

RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance.

If we complete the job early we will send a follow-up email releasing the system.

//Vraj Mehalana 09:46, 21 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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