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===== SEM#1 update=====
The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan
// [[User:John_d|Demis D. John]] 21:49, 28 May 2025 (UTC)


=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!=====
=====Job Opening: Process Engineer=====
We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails.
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)
// [[User:Mehalana v|Vraj Mehalana]] 21:48, 21 May 2025 (UTC)


===== SignupMonkey + Wiki: Off-Campus Access=====
=====EBeam2 UP=====
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure.


If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
//[[User:Mehalana v|Vraj Mehalana]] 11:48, 26 October 2023 (PDT)
=====ProbeStation scheduled IT maintenance=====
The probe station is up, only the computer is down. Standard electrical probe measurements are still available, just not automated plotting
//[[User:Mehalana v|Vraj Mehalana]] 14:29, 3 November 2023 (PDT)


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
=====PECVD2 is down=====
We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again.
//[[User:Mehalana v|Vraj Mehalana]] 16:48, 31 October 2023 (PDT)


-- Vraj
=====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am=====
// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC)
We are still working on an improved GapFill recipe.


=====New Gowns: Toolbelts purchases=====
To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run,
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.


Two vendors for cleanroom belts we are using are listed here, you may request others:
- starting Monday Oct 30th, evening at 5pm,
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
- ending Wed Nov 1st, morning at 6am.


=====Suss SB6-8E=====
Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME.
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.


I will send out an update once we have one.
Let me know if you have any questions.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT)
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


=====Wafer Bonder, (Suss SB6-8E)=====
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.

//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT)

=====EVG Activation: Up=====
The FSE has completed the work on the tool and I have made several test runs without issue.

IMPORTANT - Please see corresponding email for changes in operation.

//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT)
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Latest revision as of 22:24, 28 May 2025

SEM#1 update

The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan // Demis D. John 21:49, 28 May 2025 (UTC)

Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!

We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. // Vraj Mehalana 21:48, 21 May 2025 (UTC)

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.

If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)