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=====Stepper #1 (GCA 6300) - Scheduled Maintenance=====
===== SEM#1 update=====
The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan
The tool will be undergoing maintenance and be unavailable the following dates and times:
// [[User:John_d|Demis D. John]] 21:49, 28 May 2025 (UTC)


=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!=====
1-18-24 at 8:00am to 1-18-24 at 6:00pm
We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails.
// [[User:Mehalana v|Vraj Mehalana]] 21:48, 21 May 2025 (UTC)


===== SignupMonkey + Wiki: Off-Campus Access=====
Please plan your processing activities accordingly.
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.


If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
Bill Millerski


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST)


-- Vraj
===== Stepper #2 (GCA Autostep 200) - Scheduled Maintenance=====
// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC)
The tool will be undergoing maintenance and be unavailable the following dates and times:


=====New Gowns: Toolbelts purchases=====
1-15-24 at 8:00am to 1-17-24 at 6:00pm
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.


Two vendors for cleanroom belts we are using are listed here, you may request others:
Please plan your processing activities accordingly.
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


//[[User:Mehalana v|Vraj Mehalana]] 21:49, 21 December 2023 (PST)
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)


=====DUV is down - Update=====
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
contacted our vendor for an update and was told that the parts should ship by this Friday. If all goes well the tool should be up mid next week.


I will send out an update once we have one.
//[[User:Mehalana v|Vraj Mehalana]] 14:07, 13 December 2023 (PST)
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====PECVD2 Planned Down Time for Maintenance 12-11-23=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
PECVD2 will be going down on Monday 12-11-23 at 10:00am for replacement of the RF connector and RF Electrode.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

When the work is complete, the process group will be running tests for the remainder of the afternoon.

//[[User:Mehalana v|Vraj Mehalana]] 14:07, 13 December 2023 (PST)
=====Year End Shutdown=====
We will be shutting down lab operations Tuesday Dec 26th at 9 am for year end maintenance activities. The current plan is to be back open for operations Thursday Dec 28th at 2 pm.
The staff will be on Holiday Dec 25th & 26th, and January 1st & 2nd.

//[[User:Mehalana v|Vraj Mehalana]] 14:39, 16 November 2023 (PST)

=====Job Opening: Process Engineer=====
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.

//[[User:Mehalana v|Vraj Mehalana]] 14:52, 30 October 2023 (PDT)

=====Lab Access Changes: Symmetry App=====
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.

// [[User:John d|John d]] 13:49, 7 November 2023 (PST)

=====Wafer Bonder, (Suss SB6-8E)=====
SUSS now aims to be on site in early February. I’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)


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Latest revision as of 22:24, 28 May 2025

SEM#1 update

The service engineer had to order some more parts for the SEM. He’ll be back tomorrow to continue troubleshooting the skewing issue. In the meantime, the tool is useable and is only showing the skewing issue within the mags of 5.5k to 8.5k. Please let me know if you encounter any other issues. Thanks, Aidan // Demis D. John 21:49, 28 May 2025 (UTC)

Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - IMPORTANT: Please Read!

We will be taking down the DSE to changeout the turbo pump next Wednesday (5/28). If all goes well the tool should only be down for the day. I’ll keep you updated with emails. // Vraj Mehalana 21:48, 21 May 2025 (UTC)

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.

If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)