Difference between revisions of "Template:Announcements"
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| − | =====Stepper # |
+ | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
| + | We have finished calibrations, |
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| − | The tool will be undergoing maintenance and be unavailable the following dates and times: |
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| + | System is up. |
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| + | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | 1-18-24 at 8:00am to 1-18-24 at 6:00pm |
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| + | //11:17, 24 May 2024 (PDT) |
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| − | Please plan your processing activities accordingly. |
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| + | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| − | Bill Millerski |
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| + | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
| − | ===== |
+ | =====MA6 TSA is down - Update===== |
| + | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| − | The tool will be undergoing maintenance and be unavailable the following dates and times: |
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| + | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| − | 1-15-24 at 8:00am to 1-17-24 at 6:00pm |
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| + | -Lee |
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| − | Please plan your processing activities accordingly. |
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| + | //15:59, 22 May 2024 (PDT) |
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| + | =====Velion FIB Tool DOWN===== |
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| ⚫ | |||
| + | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| ⚫ | |||
| − | =====DUV is down - Update===== |
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| − | contacted our vendor for an update and was told that the parts should ship by this Friday. If all goes well the tool should be up mid next week. |
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| + | =====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 14:07, 13 December 2023 (PST) |
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| + | We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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| + | Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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| − | =====PECVD2 Planned Down Time for Maintenance 12-11-23===== |
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| − | PECVD2 will be going down on Monday 12-11-23 at 10:00am for replacement of the RF connector and RF Electrode. |
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| + | Sorry for the inconvenience. |
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| − | When the work is complete, the process group will be running tests for the remainder of the afternoon. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] |
+ | //[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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| − | We will be shutting down lab operations Tuesday Dec 26th at 9 am for year end maintenance activities. The current plan is to be back open for operations Thursday Dec 28th at 2 pm. |
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| − | The staff will be on Holiday Dec 25th & 26th, and January 1st & 2nd. |
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| ⚫ | |||
| − | //[[User:Mehalana v|Vraj Mehalana]] 14:39, 16 November 2023 (PST) |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| ⚫ | |||
| − | ===== |
+ | =====Lab Access Changes: Symmetry App===== |
| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| − | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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| + | -Physical card |
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| ⚫ | |||
| − | + | -Mobile phone via Symmetry App |
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| − | Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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| + | //10:54, 23 May 2024 (PDT) |
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| − | // [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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| − | SUSS |
+ | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 11:17, 24 May 2024
Stepper #3 (ASML DUV) - System UP and calibrated
We have finished calibrations, System is up.
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
//11:17, 24 May 2024 (PDT)
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.
The tool remains up for backside alignment and topside exposures that do not require alignment.
-Lee //15:59, 22 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//10:54, 23 May 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)