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=====MA6 Service Next Week - REMINDER=====
The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit.


=====Suss SB6-8E=====
The issue with the backside camera magnification getting stuck will be addressed during the visit.
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.

-Lee
//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST)
===== RIE 5 is up=====
RIE 5 is up except for processes that use SiCl4.

//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update=====
We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow.

Thanks,


-Aidan
-Aidan
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)


=====ICP1 Down=====
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


=====ICP #1 is down=====
=====Lab Access Changes: Symmetry App=====
The iris scanner has been decommissioned. Please use the card reader which supports:
The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning.


-Physical card
-Lee

//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24=====
EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm.

Please plan accordingly.

//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST)
=====Oxford Cobra: Software bugs=====
The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade.
// [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST)

=====Job Opening: Process Engineer=====
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.

//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)

=====Lab Access Changes: Symmetry App=====
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.


-Mobile phone via Symmetry App
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)


//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)
=====Wafer Bonder, (Suss SB6-8E)=====
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)


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Latest revision as of 00:45, 7 November 2024

Suss SB6-8E

When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.

-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//Vraj Mehalana 16:59, 14 June 2024 (PDT)