Template:Announcements: Difference between revisions

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=====MJB-3 Service Next Week - REMINDER=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
The MJB-3s will be unavailable Thursday Feb. 8th for their annual service visit.
-- Tony
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST)
=====MA6 Service Next Week - REMINDER=====
The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit.


⚫
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
The issue with the backside camera magnification getting stuck will be addressed during the visit.


=====Olympus DSX Microscope: Down=====
-Lee
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST)
-- Tony Bosch
⚫
===== RIE 5 is up=====
⚫
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)
RIE 5 is up except for processes that use SiCl4.


=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update=====
⚫
Please plan your work accordingly.
We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow.
⚫
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


=====ICP #2 Maint: Complete=====
⚫
Thanks,


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
⚫
-Aidan


//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)


=====ICP #1 is down=====
=====Oxford ALD+Ion Mill: UP=====
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
-Lee


Please use the original tool name on SUM to make all future tool reservations.
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24=====
EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm.


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
⚫
Please plan accordingly.


Please feel free to email me directly with any questions you may have.
//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST)
=====Oxford Cobra: Software bugs=====
The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade.
⚫
// [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST)


⚫
Thanks
=====Job Opening: Process Engineer=====
Bill Millerski
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
UCSB
⚫
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


=====New Gowns: Toolbelts purchases=====
⚫
//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.


Two vendors for cleanroom belts we are using are listed here, you may request others:
=====Lab Access Changes: Symmetry App=====
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John d|John d]] 13:49, 7 November 2023 (PST)
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

⚫
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
⚫
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====Wafer Bonder, (Suss SB6-8E)=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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