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=====Oxford Flexal ALD===== |
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The |
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday. |
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Sorry for any inconvenience this may cause. |
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Here's the schedule for when the tool will be unavailable: |
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Tues (2/6): 11:30 am - 5 pm |
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Bill Millerski |
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Wed (2/7): 8 am - 5 pm |
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This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information. |
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Thurs (2/8) 8 am - 5 pm (if needed). |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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-Lee |
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=====MJB-3 Service Next Week - REMINDER===== |
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The MJB-3s will be unavailable Thursday Feb. 8th for their annual service visit. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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=====MA6 Service Next Week - REMINDER===== |
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The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit. |
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The issue with the backside camera magnification getting stuck will be addressed during the visit. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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RIE 5 is up except for processes that use SiCl4. |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow. |
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-Aidan |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====ICP #1 is down===== |
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The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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Please plan accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST) |
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=====Oxford Cobra: Software bugs===== |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 22:24, 13 August 2025
Oxford Flexal ALD
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
Sorry for any inconvenience this may cause.
Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)