Difference between revisions of "Template:Announcements"

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=====PECVD #2 update=====
+
=====MLA Maintenance 6/24-6/27=====
  +
The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the
We are continuing to work our way through the issue plaguing this system. Unfortunately running at lower power did not work. We will send updates more regularly to keep you all informed.
 
  +
evenings.
  +
-Lee
  +
//15:59, 4 June 2024 (PDT)
   
  +
=====EBeam4 is up=====
Tony
 
  +
EBeam4 is back up.
   
  +
The overnight regen of the cryo was completed this morning.
//[[User:Mehalana v|Vraj Mehalana]] 09:52, 7 February 2024 (PST)
 
  +
I then tested the operation of the hoist numerous times without issue.
=====MLA 150 Service Next Week - REMINDER=====
 
  +
I tested the EBeam by running 200A of Ti without issue.
The MLA 150 will be down for a service visit from Tuesday February 6th to Thursday February 8th. The tool should be available in the evenings and it's possible the work will be completed by the end of Wednesday.
 
   
  +
System UP
Here's the schedule for when the tool will be unavailable:
 
   
Tues (2/6): 11:30 am - 5 pm
+
//10:36, 30 May 2024 (PDT)
   
  +
=====Stepper #1 (GCA 6300) - Tool availability=====
Wed (2/7): 8 am - 5 pm
 
  +
Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:
   
  +
6-18-24 at 8:00am
Thurs (2/8) 8 am - 5 pm (if needed).
 
  +
Till
  +
6-20-24 at 5:00pm
   
  +
Please plan your processing activities accordingly.
-Lee
 
  +
//13:32, 1 June 2024 (PDT)
   
  +
=====Stepper #2 (GCA Autostep 200) - Tool availability=====
//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST)
 
  +
Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:
   
  +
6-21-24 at 8:00am
===== MJB-3s Are up=====
 
  +
Till
The servicing is completed for both of the MJB-3s. The stage issue with the IR system has been resolved as well.
 
  +
6-21-24 at 5:00pm
   
  +
Please plan your processing activities accordingly.
//[[User:Mehalana v|Vraj Mehalana]] 15:51, 8 February 2024 (PST)
 
   
  +
Thanks
=====MA6 Service Next Week - REMINDER=====
 
  +
Bill Millerski
The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit.
 
  +
UCSB
  +
//13:32, 1 June 2024 (PDT)
   
  +
=====Stepper #3 (ASML DUV) - System UP and calibrated=====
The issue with the backside camera magnification getting stuck will be addressed during the visit.
 
  +
We have finished calibrations,
  +
System is up.
   
  +
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
-Lee
 
  +
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
   
  +
=====Unaxis VLR still Down=====
//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST)
 
=====RIE 5 is up=====
 
RIE 5 is up except for processes that use SiCl4.
 
   
  +
The chiller has a decent sized ball of ice inside of it.
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
 
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update=====
 
We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber.
 
   
  +
I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal.
I'll send out an update in the next 2-3 days.
 
  +
//13:29, 1 June 2024 (PDT)
   
  +
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
Thanks,
 
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST)
 
   
  +
=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP=====
=====ICP #1 is down=====
 
  +
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning.
 
   
  +
//[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT)
-Lee
 
   
  +
=====MA6 TSA is down - Update=====
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)
 
  +
Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.
=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24=====
 
EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm.
 
   
  +
Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:
Please plan accordingly.
 
   
  +
https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST)
 
=====Oxford Cobra: Software bugs=====
 
The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade.
 
// [[User:John_d|Demis D. John]] 10:08, 17 January 2024 (PST)
 
   
  +
-Lee
=====Job Opening: Process Engineer=====
 
  +
//15:59, 22 May 2024 (PDT)
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.
 
   
  +
=====Velion FIB Tool DOWN=====
//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)
 
  +
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
  +
  +
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT)
  +
  +
=====ICP1 Down=====
  +
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
  +
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
   
 
=====Lab Access Changes: Symmetry App=====
 
=====Lab Access Changes: Symmetry App=====
  +
The iris scanner has been decommissioned. Please use the card reader which supports:
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.
 
  +
  +
-Physical card
  +
  +
-Mobile phone via Symmetry App
   
  +
//10:54, 23 May 2024 (PDT)
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)
 
   
 
=====Wafer Bonder, (Suss SB6-8E)=====
 
=====Wafer Bonder, (Suss SB6-8E)=====

Latest revision as of 15:59, 4 June 2024

MLA Maintenance 6/24-6/27

The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the evenings. -Lee //15:59, 4 June 2024 (PDT)

EBeam4 is up

EBeam4 is back up.

The overnight regen of the cryo was completed this morning. I then tested the operation of the hoist numerous times without issue. I tested the EBeam by running 200A of Ti without issue.

System UP

//10:36, 30 May 2024 (PDT)

Stepper #1 (GCA 6300) - Tool availability

Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times:

6-18-24 at 8:00am Till 6-20-24 at 5:00pm

Please plan your processing activities accordingly. //13:32, 1 June 2024 (PDT)

Stepper #2 (GCA Autostep 200) - Tool availability

Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times:

6-21-24 at 8:00am Till 6-21-24 at 5:00pm

Please plan your processing activities accordingly.

Thanks Bill Millerski UCSB //13:32, 1 June 2024 (PDT)

Stepper #3 (ASML DUV) - System UP and calibrated

We have finished calibrations, System is up.

Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. //Vraj Mehalana 11:17, 24 May 2024 (PDT)

Unaxis VLR still Down

The chiller has a decent sized ball of ice inside of it.

I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. //13:29, 1 June 2024 (PDT)

//Vraj Mehalana 11:17, 24 May 2024 (PDT)

Atomic Force Microscope (Dimension ICON) - 05/17: System UP

Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!

//Vraj Mehalana 13:46, 20 May 2024 (PDT)

MA6 TSA is down - Update

Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.

Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:

https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication

-Lee //15:59, 22 May 2024 (PDT)

Velion FIB Tool DOWN

Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.

//Vraj Mehalana 10:58, 30 April 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//10:54, 23 May 2024 (PDT)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)