Template:Announcements: Difference between revisions
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=====Lab is OPEN===== |
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We completed our work early and the lab is now open for use. |
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We are continuing to work our way through the issue plaguing this system. Unfortunately running at lower power did not work. We will send updates more regularly to keep you all informed. |
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=====Olympus DSX Microscope: Down===== |
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After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. |
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=====MLA 150 Service Next Week - REMINDER===== |
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-- Tony Bosch |
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The MLA 150 will be down for a service visit from Tuesday February 6th to Thursday February 8th. The tool should be available in the evenings and it's possible the work will be completed by the end of Wednesday. |
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=====Stepper #3 (ASML DUV) - Maint moved to March 3rd===== |
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Here's the schedule for when the tool will be unavailable: |
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We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. |
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// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC) |
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Tues (2/6): 11:30 am - 5 pm |
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The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer |
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Wed (2/7): 8 am - 5 pm |
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Thurs (2/8) 8 am - 5 pm (if needed). |
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-Lee |
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The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you. |
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Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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Please use the original tool name on SUM to make all future tool reservations. |
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The servicing is completed for both of the MJB-3s. The stage issue with the IR system has been resolved as well. |
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There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:51, 8 February 2024 (PST) |
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Please feel free to email me directly with any questions you may have. |
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=====MA6 Service Next Week - REMINDER===== |
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The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit. |
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The issue with the backside camera magnification getting stuck will be addressed during the visit. |
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Bill Millerski |
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UCSB |
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//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
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-Lee |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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RIE 5 is up except for processes that use SiCl4. |
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//[[User: |
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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-Aidan |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST) |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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Latest revision as of 22:23, 10 February 2025
Lab is OPEN
We completed our work early and the lab is now open for use. -- Tony
//Demis D. John 22:23, 10 February 2025 (UTC)
Olympus DSX Microscope: Down
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)
Stepper #3 (ASML DUV) - Maint moved to March 3rd
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)
ICP #2 Maint: Complete
The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
//Demis D. John 02:01, 5 February 2025 (UTC)
Oxford ALD+Ion Mill: UP
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
Please use the original tool name on SUM to make all future tool reservations.
There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
Please feel free to email me directly with any questions you may have.
Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)