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=====PECVD #2 update===== |
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We are continuing to work our way through the issue plaguing this system. Unfortunately running at lower power did not work. We will send updates more regularly to keep you all informed. |
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=====Christmas Lab Shutdown: Dec 22-25===== |
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Tony |
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Users, |
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To perform annual maintenance, we are planning to have the lab shut down from '''''9 am on Monday December 22 through 9 am Friday December 26th'''''. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:52, 7 February 2024 (PST) |
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=====MLA 150 Service Next Week - REMINDER===== |
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The MLA 150 will be down for a service visit from Tuesday February 6th to Thursday February 8th. The tool should be available in the evenings and it's possible the work will be completed by the end of Wednesday. |
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Here's the schedule for when the tool will be unavailable: |
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Tues (2/6): 11:30 am - 5 pm |
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Wed (2/7): 8 am - 5 pm |
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Thurs (2/8) 8 am - 5 pm (if needed). |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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===== MJB-3s Are up===== |
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The servicing is completed for both of the MJB-3s. The stage issue with the IR system has been resolved as well. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:51, 8 February 2024 (PST) |
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=====MA6 Service Next Week - REMINDER===== |
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The MA-6 will be unavailable Tuesday Feb 6th from 8 am to roughly 5 pm for its annual service visit. |
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The issue with the backside camera magnification getting stuck will be addressed during the visit. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 1 February 2024 (PST) |
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=====RIE 5 is up===== |
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RIE 5 is up except for processes that use SiCl4. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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I'll send out an update in the next 2-3 days. |
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Thanks, |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST) |
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=====ICP #1 is down - Update===== |
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Replacing the battery on the board did not resolve the tool issue. |
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Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Planned Maintenance 2/7/24 - 2/8/24===== |
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EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm. |
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Please plan accordingly. |
Please plan accordingly. |
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- Peder Lenvik |
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=====Announcements moved===== |
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//[[User:Mehalana v|Vraj Mehalana]] 09:28, 26 January 2024 (PST) |
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Please check the announcements in SignupMonkey for equipment notifications. |
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=====Oxford Cobra: Software bugs===== |
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The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 06:39, 3 December 2025
Christmas Lab Shutdown: Dec 22-25
Users, To perform annual maintenance, we are planning to have the lab shut down from 9 am on Monday December 22 through 9 am Friday December 26th.
Please plan accordingly. - Peder Lenvik // Demis D. John 02:03, 27 November 2025 (UTC)
Announcements moved
Please check the announcements in SignupMonkey for equipment notifications. // Demis D. John 02:03, 27 November 2025 (UTC)