Template:Announcements: Difference between revisions

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=====E-Beam #4 (CHA) - EB4 Update=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
After extensive troubleshooting it looks like the cryo pump will need to be replaced. We are hopeful the system will be ready to run sometime tomorrow early afternoon.
⚫
-- Tony


⚫
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
⚫
Tony


=====Olympus DSX Microscope: Down=====
⚫
//[[User:Mehalana v|Vraj Mehalana]] 18:55, 13 February 2024 (PST)
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
⚫
=====PECVD #2 is UP=====
-- Tony Bosch
The tool is up, intial film checks show same dep. rates as before.
//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST)
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


=====RIE 5 is up=====
=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
RIE 5 is up except for processes that use SiCl4.
⚫
Please plan your work accordingly.
⚫
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


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=====ICP #2 Maint: Complete=====
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update=====
We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber.


⚫
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)
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I'll send out an update in the next 2-3 days.


=====Oxford ALD+Ion Mill: UP=====
⚫
Thanks,
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST)


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
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=====ICP #1 is down - Update=====
Replacing the battery on the board did not resolve the tool issue.


Please use the original tool name on SUM to make all future tool reservations.
Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point.


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
-Lee
//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST)


Please feel free to email me directly with any questions you may have.
=====EBeam3 Planned Maintenance 2/21/24 - 2/22/24=====
The transfer arm installation has been postponed until next week due to other equipment being down at this time.


⚫
Thanks
The work is now scheduled for 2/21/24 - 2/22/24.
Bill Millerski
⚫
Please plan accordingly.
UCSB
⚫
//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST)
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


=====Job Opening: Process Engineer=====
=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details.


Two vendors for cleanroom belts we are using are listed here, you may request others:
⚫
//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT)
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
=====Lab Access Changes: Symmetry App=====
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''.


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=====Suss SB6-8E=====
// [[User:John d|John d]] 13:49, 7 November 2023 (PST)
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.


⚫
I will send out an update once we have one.
=====Wafer Bonder, (Suss SB6-8E)=====
-Aidan
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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