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=====E-Beam #4 (CHA) - EB4 Update===== |
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After extensive troubleshooting it looks like the cryo pump will need to be replaced. We are hopeful the system will be ready to run sometime tomorrow early afternoon. |
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=====Christmas Lab Shutdown: Dec 22-25===== |
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Tony |
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Users, |
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To perform annual maintenance, we are planning to have the lab shut down from '''''9 am on Monday December 22 through 9 am Friday December 26th'''''. |
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//[[User:Mehalana v|Vraj Mehalana]] 18:55, 13 February 2024 (PST) |
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=====PECVD #2 is UP===== |
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The tool is up, intial film checks show same dep. rates as before. |
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=====RIE 5 is up===== |
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RIE 5 is up except for processes that use SiCl4. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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I'll send out an update in the next 2-3 days. |
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Thanks, |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST) |
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=====ICP #1 is down - Update===== |
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Replacing the battery on the board did not resolve the tool issue. |
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Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Planned Maintenance 2/21/24 - 2/22/24===== |
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The transfer arm installation has been postponed until next week due to other equipment being down at this time. |
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The work is now scheduled for 2/21/24 - 2/22/24. |
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Please plan accordingly. |
Please plan accordingly. |
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- Peder Lenvik |
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//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST) |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Announcements moved===== |
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Please check the announcements in SignupMonkey for equipment notifications. |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User: |
// [[User:John_d|Demis D. John]] 02:03, 27 November 2025 (UTC) |
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Latest revision as of 06:39, 3 December 2025
Christmas Lab Shutdown: Dec 22-25
Users, To perform annual maintenance, we are planning to have the lab shut down from 9 am on Monday December 22 through 9 am Friday December 26th.
Please plan accordingly. - Peder Lenvik // Demis D. John 02:03, 27 November 2025 (UTC)
Announcements moved
Please check the announcements in SignupMonkey for equipment notifications. // Demis D. John 02:03, 27 November 2025 (UTC)