Template:Announcements: Difference between revisions
Mehalana v (talk | contribs) |
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===== New Raith EBL: tool up ===== |
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It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). |
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Cryo replaced, system ready for use. |
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We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage. |
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We will be signing off on the tool tomorrow morning at which point the tool will be available for '''general EBL use to our nanofab community'''. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell |
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// [[User:John_d|Demis D. John]] 16:28, 2 July 2025 (UTC) |
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The tool is up, intial film checks show same dep. rates as before. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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RIE 5 is up except for processes that use SiCl4. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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=====Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update===== |
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We received most of the chamber assembly replacement parts today. We are still waiting on the lamps and chamber o-rings which are scheduled to be delivered in the next couple of days. Once we have all the parts, we'll start to reassemble the chamber. |
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-- Vraj |
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// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC) |
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Thanks, |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 5 February 2024 (PST) |
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=====ICP #1 is down - Update===== |
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-Aidan |
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Replacing the battery on the board did not resolve the tool issue. |
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=====ICP1 Down===== |
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Panasonic has located a replacement board for the tool. From what I gather they need to repair and test it and are hoping to have it ready to ship by the 16th. I'd like to add that there is the possibility that this will not resolve the issue but it is the best path forward at this point. |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 09:39, 30 January 2024 (PST) |
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=====EBeam3 Transfer Arm Upgrade - Postponed===== |
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The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues. |
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I am waiting to hear back from the manufacturer so at this time I can not reschedule yet. |
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I will send another notification when everything has been worked out, and I am ready to schedule the installation. |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 16:28, 2 July 2025
New Raith EBL: tool up
It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.
We will be signing off on the tool tomorrow morning at which point the tool will be available for general EBL use to our nanofab community. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell // Demis D. John 16:28, 2 July 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)