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=====Oxford Flexal ALD===== |
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The |
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday. |
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//13:47, 26 February 2024 (PST) |
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Sorry for any inconvenience this may cause. |
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=====PlasmaTherm DSEIII is down - Update===== |
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We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon. |
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Thanks |
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=====ICP #1 is down - Update===== |
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Bill Millerski |
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Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date). |
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//[[User: |
//[[User:Mehalana v|Vraj Mehalana]] 21:12, 12 August 2025 (UTC) |
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=====Suss SB6-8E===== |
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This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information. |
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RIE 5 is up except for processes that use SiCl4. |
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//[[User: |
// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues. |
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I am waiting to hear back from the manufacturer so at this time I can not reschedule yet. |
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I will send another notification when everything has been worked out, and I am ready to schedule the installation. |
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//[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST) |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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//[[User:John d|Demis D. John]] 14:52, 30 October 2023 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 22:24, 13 August 2025
Oxford Flexal ALD
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
Sorry for any inconvenience this may cause.
Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)