Main Page

Welcome to the UCSB Nanofab Wiki

See sidebar for              Equipment & Recipes Frequently Asked Questions Make sure you know the Lab Rules

Equipment Info Recipes + Processes Data + Info Other Links: SignUpMonkey Get into the Lab Fabrication Services NanoTech Homepage NanoFab Job Postings UCSB ECE Dept. Lithography Deposition Dry Etch Wet Process Thermal Process Packaging/Bonding Metrology/Test Lithography Deposition Dry Etching Wet Etching Thermal Process Packaging/Bonding Process Control Data Tutorials ← NEW Calculators + Utilities Nanofab Data + Info Research + Publications Tech Talks Raith EBL Update Raith replaced every item that was left to replace in the column on Monday. Yesterday they performed some quick tests @ 50kV and the issue with deflector settling was gone. This is an extremely positive result! It almost certainly suggests that the issue has been repaired. However, tests @ 100 kV remain to confirm the behavior and we are doing so later today and early tomorrow morning. I am pretty confident that we are going to have a fully functional EBL system available for use early next week! -Bill // Demis D. John 17:42, 5 June 2025 (UTC) SignupMonkey + Wiki: Off-Campus Access Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn -- Vraj // Demis D. John 20:08, 22 April 2025 (UTC) Suss SB6-8E We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC) ICP1 Down The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST) News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons - $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara. $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries. // Demis D. John 16:32, 23 September 2024 (PDT) NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. // Demis D. John 13:15, 14 August 2024 (PDT) CHIPS Act Award Announced to USC and UCSB NanoFab U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT) RIE#3 Removed We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT) NanoFab staff awarded Goleta's Innovator of the Year 2023 NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST) NanoFab Featured in Regional Tech Videos The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. See the videos here: Santa Barbara County: This is TechTopia UCSB NanoFab: An Innovation Center // John d 09:26, 1 November 2023 (PST) See older articles at this link General Information NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans.

For any questions, comments or concerns regarding the wiki, please contact the NanoFab IT Team.