Template:Announcements: Difference between revisions
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=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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We completed our work early and the lab is now open for use. |
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Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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-- Tony |
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//[[User: |
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC) |
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=====Olympus DSX Microscope: Down===== |
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After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. |
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We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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-- Tony Bosch |
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// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC) |
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The tool remains up for backside alignment and topside exposures that do not require alignment. |
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We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. |
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Please plan your work accordingly. |
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// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC) |
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=====ICP #2 Maint: Complete===== |
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-Lee |
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//15:59, 22 May 2024 (PDT) |
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The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer |
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=====Velion FIB Tool DOWN===== |
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Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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//[[User: |
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC) |
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=====Oxford ALD+Ion Mill: UP===== |
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The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you. |
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We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time. |
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Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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Please use the original tool name on SUM to make all future tool reservations. |
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Sorry for the inconvenience. |
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There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool. |
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Please feel free to email me directly with any questions you may have. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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Thanks |
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=====Lab Access Changes: Symmetry App===== |
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Bill Millerski |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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UCSB |
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-Physical card |
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//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC) |
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-Mobile phone via Symmetry App |
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=====New Gowns: Toolbelts purchases===== |
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//10:54, 23 May 2024 (PDT) |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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I will send out an update once we have one. |
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-Aidan |
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=====ICP1 Down===== |
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Latest revision as of 22:23, 10 February 2025
Lab is OPEN
We completed our work early and the lab is now open for use. -- Tony
//Demis D. John 22:23, 10 February 2025 (UTC)
Olympus DSX Microscope: Down
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)
Stepper #3 (ASML DUV) - Maint moved to March 3rd
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)
ICP #2 Maint: Complete
The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
//Demis D. John 02:01, 5 February 2025 (UTC)
Oxford ALD+Ion Mill: UP
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
Please use the original tool name on SUM to make all future tool reservations.
There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
Please feel free to email me directly with any questions you may have.
Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)