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=====Oxford Flexal ALD===== |
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=====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday. |
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We have finished calibrations, |
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System is up. |
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Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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Thanks |
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//11:17, 24 May 2024 (PDT) |
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Bill Millerski |
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=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information. |
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Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC) |
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=====MA6 TSA is down - Update===== |
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We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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The tool remains up for backside alignment and topside exposures that do not require alignment. |
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-Lee |
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//15:59, 22 May 2024 (PDT) |
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=====Velion FIB Tool DOWN===== |
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Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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=====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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//[[User:Mehalana v|Vraj Mehalana]] 19:04, 21 May 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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//10:54, 23 May 2024 (PDT) |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 22:24, 13 August 2025
Oxford Flexal ALD
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
Sorry for any inconvenience this may cause.
Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)