Difference between revisions of "Template:Announcements"

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=====EBeam4 Update - Still down=====
+
=====MLA Service this Tuesday=====
  +
HIMT will be onsite around 9am this Tuesday to address a minor issue with the tool. I have the blocked out until 5 pm but we do not anticipate it taking that long, hopefully about 4-5 hours. I'll send out an email once the tool is available.
EBeam4 will remain down overnight.
 
   
 
-Lee
The new motor arrived as well as the new junction box and new cables.
 
 
//[[User:Mehalana v|Vraj Mehalana]] 12:20, 27 September 2024 (PDT)
   
 
=====DSE is UP=====
I removed the old junction box/plugs due to a lot of corrosion inside the box caused by it being located directly under the water supply lines.
 
  +
I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.
   
  +
Thanks, Aidan
This corrosion inside the box could have contributed to the failure of the old motor.
 
 
// [[User:John_d|Demis D. John]] 12:36, 20 September 2024 (PDT)
   
 
=====Suss SB6-8E=====
I installed the new motor, ran all new cables to the new junction box in it's new location away from the water lines.
 
  +
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
   
  +
-Aidan
I was able to test the function of the hoist by raising and lowering the bell jar while in manual mode.
 
 
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)
   
  +
=====YES is available=====
For safety reasons, I had the machine powered off during the duration of the work being done, so the cryo will be in regen overnight.
 
  +
The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.
   
  +
This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.
Tomorrow morning I will continue testing the system to ensure everything is working properly before I release the tool.
 
   
 
// [[User:Mehalana v|Vraj Mehalana]] 14:16, 18 September 2024 (PDT)
I will send another email when an update is available.
 
 
//10:36, 30 May 2024 (PDT)
 
 
=====Stepper #3 (ASML DUV) - System UP and calibrated=====
 
We have finished calibrations,
 
System is up.
 
 
Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.
 
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
 
 
=====Unaxis VLR still Down=====
 
 
The chiller has a decent sized ball of ice inside of it.
 
 
I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal.
 
//13:29, 1 June 2024 (PDT)
 
 
//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT)
 
 
=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP=====
 
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
 
 
//[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT)
 
 
=====MA6 TSA is down - Update=====
 
Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience.
 
 
Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools:
 
 
https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
 
 
-Lee
 
//15:59, 22 May 2024 (PDT)
 
 
=====Velion FIB Tool DOWN=====
 
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
 
 
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT)
 
   
 
=====ICP1 Down=====
 
=====ICP1 Down=====
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-Mobile phone via Symmetry App
 
-Mobile phone via Symmetry App
   
//10:54, 23 May 2024 (PDT)
+
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)
 
=====Wafer Bonder, (Suss SB6-8E)=====
 
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
 
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST)
 
   
 
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Latest revision as of 12:20, 27 September 2024

MLA Service this Tuesday

HIMT will be onsite around 9am this Tuesday to address a minor issue with the tool. I have the blocked out until 5 pm but we do not anticipate it taking that long, hopefully about 4-5 hours. I'll send out an email once the tool is available.

-Lee //Vraj Mehalana 12:20, 27 September 2024 (PDT)

DSE is UP

I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.

Thanks, Aidan // Demis D. John 12:36, 20 September 2024 (PDT)

Suss SB6-8E

When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.

-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)

YES is available

The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.

This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.

// Vraj Mehalana 14:16, 18 September 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//Vraj Mehalana 16:59, 14 June 2024 (PDT)