Template:Announcements: Difference between revisions
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===== New Raith EBL: tool up ===== |
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It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). |
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EBeam4 is back up. |
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We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage. |
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We will be signing off on the tool tomorrow morning at which point the tool will be available for '''general EBL use to our nanofab community'''. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell |
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The overnight regen of the cryo was completed this morning. |
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// [[User:John_d|Demis D. John]] 16:28, 2 July 2025 (UTC) |
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I then tested the operation of the hoist numerous times without issue. |
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I tested the EBeam by running 200A of Ti without issue. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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System UP |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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//10:36, 30 May 2024 (PDT) |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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=====Stepper #1 (GCA 6300) - Tool availability===== |
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Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: |
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-- Vraj |
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6-18-24 at 8:00am |
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Till |
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6-20-24 at 5:00pm |
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Please plan your processing activities accordingly. |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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//13:32, 1 June 2024 (PDT) |
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I will send out an update once we have one. |
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=====Stepper #2 (GCA Autostep 200) - Tool availability===== |
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-Aidan |
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Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: |
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6-21-24 at 8:00am |
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Till |
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6-21-24 at 5:00pm |
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Please plan your processing activities accordingly. |
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Thanks |
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Bill Millerski |
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UCSB |
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//13:32, 1 June 2024 (PDT) |
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=====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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We have finished calibrations, |
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System is up. |
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Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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=====Unaxis VLR still Down===== |
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The chiller has a decent sized ball of ice inside of it. |
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I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. |
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//13:29, 1 June 2024 (PDT) |
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//[[User:Mehalana v|Vraj Mehalana]] 11:17, 24 May 2024 (PDT) |
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=====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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//[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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=====MA6 TSA is down - Update===== |
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Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience. |
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Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools: |
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https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication |
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-Lee |
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//15:59, 22 May 2024 (PDT) |
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=====Velion FIB Tool DOWN===== |
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Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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//10:54, 23 May 2024 (PDT) |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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Latest revision as of 16:28, 2 July 2025
New Raith EBL: tool up
It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.
We will be signing off on the tool tomorrow morning at which point the tool will be available for general EBL use to our nanofab community. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell // Demis D. John 16:28, 2 July 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)