Template:Announcements: Difference between revisions
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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The issues still remain but the investigation is pointing to a couple of boards in an external control computer. JEOL service are running a test overnight to try isolate the issue. Hopefully more will be known in the morning. |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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System down for now... |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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=====Unaxis ICP-PECVD Update===== |
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Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening. |
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Tony |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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//[[User:Mehalana v|Vraj Mehalana]] 16:26, 26 July 2024 (PDT) |
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=====Dicing Saw Service Visit===== |
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The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution. |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:23, 8 July 2024 (PDT) |
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=====Velion FIB Tool DOWN===== |
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Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week. |
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The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions. |
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-Dan |
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//[[User:Mehalana v|Vraj Mehalana]] 10:23, 8 July 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)