Template:Announcements: Difference between revisions

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=====Suss SB6-8E=====
=====Lab is OPEN=====
We completed our work early and the lab is now open for use.
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-- Tony


⚫
//[[User:John_d|Demis D. John]] 22:23, 10 February 2025 (UTC)
⚫
-Aidan
⚫
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)


=====MLA150: Down=====
=====Olympus DSX Microscope: Down=====
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more.
The tool is down due to the intermittent head crash issue. I am waiting to hear back from the vendor as to when we will have someone out to look at it. --Lee
-- Tony Bosch
⚫
// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC)


=====Stepper #3 (ASML DUV) - Maint moved to March 3rd=====
⚫
// [[User:John_d|Demis D. John]] 16:40, 28 August 2024 (PDT)
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd.
Please plan your work accordingly.
⚫
// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC)


=====EBeam#2: Down=====
=====ICP #2 Maint: Complete=====
Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good.


The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter.


-Lee // [[User:John_d|Demis D. John]] 14:24, 27 August 2024 (PDT)
//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC)


=====YES EcoClean: 3kW only=====
=====Oxford ALD+Ion Mill: UP=====
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further.


Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
System is up for 3kW recipes only.


Please use the original tool name on SUM to make all future tool reservations.
DO NOT run 0.7kW recipes until further notice!!


There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
--
⚫
Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT)


Please feel free to email me directly with any questions you may have.
⚫
=====Wafer Bonder, (Suss SB6-8E)=====
A third party bonder repair company will be out here the week of the 26th. The goal is to install the new top heater and then to do a full PM. If all goes well the tool will be available to use late that week. I’ll send out another email once I have more information. Thanks, Aidan.


Thanks
⚫
// [[User:John_d|Demis D. John]] 15:52, 6 August 2024 (PDT)
Bill Millerski
UCSB
//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC)


=====ICP1 Down=====
=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
⚫
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


Two vendors for cleanroom belts we are using are listed here, you may request others:
=====Lab Access Changes: Symmetry App=====
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
The iris scanner has been decommissioned. Please use the card reader which supports:
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
-Physical card


⚫
=====Suss SB6-8E=====
-Mobile phone via Symmetry App
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.


I will send out an update once we have one.
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)
⚫
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
⚫
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)


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Latest revision as of 22:23, 10 February 2025

Lab is OPEN

We completed our work early and the lab is now open for use. -- Tony

//Demis D. John 22:23, 10 February 2025 (UTC)

Olympus DSX Microscope: Down

After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)

Stepper #3 (ASML DUV) - Maint moved to March 3rd

We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)

ICP #2 Maint: Complete

The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer

//Demis D. John 02:01, 5 February 2025 (UTC)

Oxford ALD+Ion Mill: UP

The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.

Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.

Please use the original tool name on SUM to make all future tool reservations.

There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.

Please feel free to email me directly with any questions you may have.

Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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