Template:Announcements: Difference between revisions
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=====Lab Closure: Mon Feb 10th, 8a-12n===== |
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Users, The lab will be closed from 8 am to noon on Monday February 10th to facilitate the removal of the JEOL EBL. Please plan accordingly. |
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The Backend Lab (Rm. 1111) will still be open. |
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Sorry to say, I was not able to remedy the wafer handling pick up issue, and the system still intermittent,y fails to pick up a wafer correctly. I might have a temporary workaround by using specific slots and such, but I would need to help you do this. |
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I have ordered a replacement for the possibly failing WH board causing this. |
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I will notify everyone when we complete the move and open the lab back up. |
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Let me know if you want to try and run one or two wafers through and I might be able to help you do this, but I was having difficulty getting exposures to run properly. |
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Peder Lenvik |
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To fix the main alignment, laser issue, Asml engineers will be on site Monday and Tuesday next week, so the tool will be down during that time to perform the repairs. |
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//[[User:Mehalana v|Vraj Mehalana]] 17:46, 11 September 2024 (PDT) |
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After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. |
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-- Tony Bosch |
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We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. |
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House vacuum repair has been completed, lab is open for use. |
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Please plan your work accordingly. |
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// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC) |
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=====ICP #2 Maint: Complete===== |
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Heidelberg engineer is on site working on repair, we will update as we learn more. |
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The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer |
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=====IBD is UP===== |
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The IBD is back up. |
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//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC) |
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With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. |
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=====Oxford ALD+Ion Mill: UP===== |
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The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time. |
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//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
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Please use the original tool name on SUM to make all future tool reservations. |
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There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool. |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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Please feel free to email me directly with any questions you may have. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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Thanks |
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Bill Millerski |
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UCSB |
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//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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System is up for 3kW recipes only. |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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DO NOT run 0.7kW recipes until further notice!! |
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-- |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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I will send out an update once we have one. |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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Latest revision as of 21:14, 7 February 2025
Lab Closure: Mon Feb 10th, 8a-12n
Users, The lab will be closed from 8 am to noon on Monday February 10th to facilitate the removal of the JEOL EBL. Please plan accordingly.
The Backend Lab (Rm. 1111) will still be open.
I will notify everyone when we complete the move and open the lab back up.
Peder Lenvik // Demis D. John 21:13, 7 February 2025 (UTC)
Olympus DSX Microscope: Down
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)
Stepper #3 (ASML DUV) - Maint moved to March 3rd
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)
ICP #2 Maint: Complete
The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
//Demis D. John 02:01, 5 February 2025 (UTC)
Oxford ALD+Ion Mill: UP
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
Please use the original tool name on SUM to make all future tool reservations.
There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
Please feel free to email me directly with any questions you may have.
Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)