Template:Announcements: Difference between revisions
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===== New Raith EBL: tool up ===== |
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It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). |
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We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage. |
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We will be signing off on the tool tomorrow morning at which point the tool will be available for '''general EBL use to our nanofab community'''. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell |
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=====Stepper #3 (ASML DUV) - Down, update |
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=====Stepper #3 (ASML DUV) - Down, update===== |
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Sorry to say, I was not able to remedy the wafer handling pick up issue, and the system still intermittent,y fails to pick up a wafer correctly. I might have a temporary workaround by using specific slots and such, but I would need to help you do this. |
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I have ordered a replacement for the possibly failing WH board causing this. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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Let me know if you want to try and run one or two wafers through and I might be able to help you do this, but I was having difficulty getting exposures to run properly. |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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To fix the main alignment, laser issue, Asml engineers will be on site Monday and Tuesday next week, so the tool will be down during that time to perform the repairs. |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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//[[User:Mehalana v|Vraj Mehalana]] 17:46, 11 September 2024 (PDT) |
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-- Vraj |
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=====LAB OPEN===== |
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House vacuum repair has been completed, lab is open for use. |
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//[[User:John_d|Demis D. John]] 12:13, 6 September 2024 (PDT) |
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=====MLA150: Down===== |
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Heidelberg engineer is on site working on repair, we will update as we learn more. |
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=====IBD is UP===== |
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The IBD is back up. |
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With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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I will send out an update once we have one. |
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-Aidan |
-Aidan |
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//[[User: |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====EBeam#2: Down===== |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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-Lee // [[User:John_d|Demis D. John]] 14:24, 27 August 2024 (PDT) |
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=====YES EcoClean: 3kW only===== |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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System is up for 3kW recipes only. |
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DO NOT run 0.7kW recipes until further notice!! |
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-- |
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Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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Latest revision as of 16:28, 2 July 2025
New Raith EBL: tool up
It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.
We will be signing off on the tool tomorrow morning at which point the tool will be available for general EBL use to our nanofab community. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell // Demis D. John 16:28, 2 July 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)