Template:Announcements: Difference between revisions
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After installing our backup spool the system ran for approximately 15 minutes and then failed again due to a leak in the chamber. I took apart the chamber and found a crack on the backup spool. |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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I spoke to an engineer at PlasmaTherm and he told me this issue was indicative of a failing lamp (or lamps) that was causing a large delta of heat across the ceramic spool. |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey, except for users '''on campus using UCSB Wi-Fi or LAN'''. |
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If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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I requested to have a couple new spools to be overnighted but they most likely won’t ship out until Monday. I tested the lamps and found two that were pretty heavily oxidized on the leads. |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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I’ll install all new lamps and the new spool when it gets in next week. |
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This is hopefully a temporary solution, we will implement other remedies next week. |
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//13:02, 16 September 2024 (PDT) |
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-- Vraj |
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Replaced bad PLC controller on Depo beam. I then tested the beam with a 15 min gridclean recipe without issue. |
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I then ran an SiO2 dep, and a 1 hour gridclean without issue. |
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System UP - Mike Barreraz |
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The computer is not coming up, after the campus-wide power outage last week. Will continue to work on it next week. |
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=====Fluorine ICP: UP===== |
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=====Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service===== |
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We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days. |
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Raith service need to work on the Velion a little longer than anticipated. I'll keep the tool down until 2pm tomorrow (Tuesday). I'll send further updates if anything changes. |
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Thanks, |
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Aidan |
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=====Lab Closure Monday the 16th===== |
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Fire Drill completed. Lab open. |
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// [[User:Mehalana v|Vraj Mehalana]] 10:57, 12 September 2024 (PDT) |
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=====EVG - Scheduled downtime===== |
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I am looking at sending that generator on the week of March 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks. |
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Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. |
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Please let me know if this does not work for you or if you prefer one week over the other. |
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=====Stepper #3 (ASML DUV) - Down, update===== |
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The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. |
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-Lee |
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ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. |
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// |
//[[User:Mehalana v|Vraj Mehalana]] 17:50, 26 March 2025 (UTC) |
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Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. |
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=====New Gowns: Toolbelts purchases===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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I will send out an update once we have one. |
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-Aidan |
-Aidan |
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//[[User: |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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Bell jar mount is in place. Hoist has been tested several times. System is ready to use. |
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=====YES EcoClean UP===== |
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The YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light. |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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Latest revision as of 15:24, 5 April 2025
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey, except for users on campus using UCSB Wi-Fi or LAN.
If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
This is hopefully a temporary solution, we will implement other remedies next week.
-- Vraj // Demis D. John 03:41, 5 April 2025 (UTC)
Unaxis Dep: DOWN
The computer is not coming up, after the campus-wide power outage last week. Will continue to work on it next week. // Demis D. John 11:00, 4 April 2025 (UTC)
Fluorine ICP: UP
We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days.
Thanks,
Aidan // Demis D. John 06:39, 3 April 2025 (UTC)
EVG - Scheduled downtime
I am looking at sending that generator on the week of March 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.
Please let me know if this does not work for you or if you prefer one week over the other.
-Lee //Vraj Mehalana 17:50, 26 March 2025 (UTC)
Raith Velion UP
Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. --Dan //Vraj Mehalana 22:27, 1 April 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)