Template:Announcements: Difference between revisions
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After installing our backup spool the system ran for approximately 15 minutes and then failed again due to a leak in the chamber. I took apart the chamber and found a crack on the backup spool. |
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I spoke to an engineer at PlasmaTherm and he told me this issue was indicative of a failing lamp (or lamps) that was causing a large delta of heat across the ceramic spool. |
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The vendor (Oxford) will be on site Tuesday the 10th until Friday the 13th to address various issues with this tool and it will be unavailable for use. -- Millerski |
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=====Holography/PL: HeCd Laser Down Mon Dec 16th===== |
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I requested to have a couple new spools to be overnighted but they most likely won’t ship out until Monday. I tested the lamps and found two that were pretty heavily oxidized on the leads. |
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The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again on Monday Jan 6th (or possibly earlier). |
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We will be installing the refurbished laser which will have higher output power. |
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Holography will be unavailable during this time, but all other PL lasers will be available. |
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I’ll install all new lamps and the new spool when it gets in next week. |
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=====Lab Shutdown: Dec 26 to Jan 3rd===== |
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//[[User:Mehalana v|Vraj Mehalana]] 13:02, 16 September 2024 (PDT) |
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We will be shutting down the lab for year end maintenance activities at 7am December 26th. The current plan is to open back up at 7am on January 3rd. We will update the schedule if needed. |
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=====IBD is UP===== |
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Replaced bad PLC controller on Depo beam. I then tested the beam with a 15 min gridclean recipe without issue. |
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I then ran an SiO2 dep, and a 1 hour gridclean without issue. |
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During the shutdown this year we will be pulling all cleanroom suits and stocking new suits. |
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System UP - Mike Barreraz |
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PLEASE REMOVE ALL PERSONAL ITEMS FROM THE GOWNING ROOM PRIOR TO DECEMBER 26TH |
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=====Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service===== |
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Raith service need to work on the Velion a little longer than anticipated. I'll keep the tool down until 2pm tomorrow (Tuesday). I'll send further updates if anything changes. |
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-Dan |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 12 September 2024 (PDT) |
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=====New Gowns in Jan===== |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. |
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Fire Drill completed. Lab open. |
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// [[User: |
// [[User:John_d|Demis D. John]] 16:58, 24 November 2024 (UTC) |
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=====MLA150: UP===== |
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Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. |
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=====Stepper #3 (ASML DUV) - Down, update===== |
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The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. |
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ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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I will send out an update once we have one. |
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-Aidan |
-Aidan |
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//[[User: |
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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=====EBeam#2: Up===== |
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Bell jar mount is in place. Hoist has been tested several times. System is ready to use. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====YES EcoClean UP===== |
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The YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light. |
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// [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Latest revision as of 00:35, 8 December 2024
Oxford ALD+Ion Mill
The vendor (Oxford) will be on site Tuesday the 10th until Friday the 13th to address various issues with this tool and it will be unavailable for use. -- Millerski // Demis D. John 00:34, 8 December 2024 (UTC)
Holography/PL: HeCd Laser Down Mon Dec 16th
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again on Monday Jan 6th (or possibly earlier). We will be installing the refurbished laser which will have higher output power.
Holography will be unavailable during this time, but all other PL lasers will be available. // Demis D. John 17:56, 7 December 2024 (UTC)
Lab Shutdown: Dec 26 to Jan 3rd
We will be shutting down the lab for year end maintenance activities at 7am December 26th. The current plan is to open back up at 7am on January 3rd. We will update the schedule if needed.
During the shutdown this year we will be pulling all cleanroom suits and stocking new suits.
PLEASE REMOVE ALL PERSONAL ITEMS FROM THE GOWNING ROOM PRIOR TO DECEMBER 26TH
//Demis D. John 16:55, 24 November 2024 (UTC)
New Gowns in Jan
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. // Demis D. John 16:58, 24 November 2024 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)