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(Raith EBL up)
 
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=====DSE is UP=====
===== New Raith EBL: tool up =====
It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field).
I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process.
We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.


We will be signing off on the tool tomorrow morning at which point the tool will be available for '''general EBL use to our nanofab community'''. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell
Thanks, Aidan
// [[User:John_d|Demis D. John]] 12:36, 20 September 2024 (PDT)
// [[User:John_d|Demis D. John]] 16:28, 2 July 2025 (UTC)


=====Suss SB6-8E=====
===== SignupMonkey + Wiki: Off-Campus Access=====
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.


If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
-Aidan
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
=====YES is available=====
The error has been cleared and I ran a shorter 5 minute recipe with no warning/error.


-- Vraj
This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches.
// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC)


=====Suss SB6-8E=====
// [[User:Mehalana v|Vraj Mehalana]] 14:16, 18 September 2024 (PDT)
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

=====Lab Access Changes: Symmetry App=====
The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)


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Latest revision as of 16:28, 2 July 2025

New Raith EBL: tool up

It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.

We will be signing off on the tool tomorrow morning at which point the tool will be available for general EBL use to our nanofab community. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell // Demis D. John 16:28, 2 July 2025 (UTC)

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.

If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)