Template:Announcements: Difference between revisions
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=====Lab is OPEN===== |
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We completed our work early and the lab is now open for use. |
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HIMT will be onsite around 9am this Tuesday to address a minor issue with the tool. I have the blocked out until 5 pm but we do not anticipate it taking that long, hopefully about 4-5 hours. I'll send out an email once the tool is available. |
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-- Tony |
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-Lee |
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=====Olympus DSX Microscope: Down===== |
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After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. |
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I’ve completed the installation of the new spool and lamps and the tool is free to use. We’ve run a number of different etches and upon initial inspection everything looks normal. However, it’s recommended you start with a test etch in case there is a slight shift in process. |
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-- Tony Bosch |
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// [[User:John_d|Demis D. John]] 20:41, 5 February 2025 (UTC) |
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=====Stepper #3 (ASML DUV) - Maint moved to March 3rd===== |
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We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. |
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Please plan your work accordingly. |
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// [[User:John_d|Demis D. John]] 19:44, 4 February 2025 (UTC) |
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=====ICP #2 Maint: Complete===== |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer |
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//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
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//[[User:John_d|Demis D. John]] 02:01, 5 February 2025 (UTC) |
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The error has been cleared and I ran a shorter 5 minute recipe with no warning/error. |
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=====Oxford ALD+Ion Mill: UP===== |
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This seems to be exclusive to the longer (8+ minute recipes), which are throwing warnings for every wafer run this long. It also appears that running 3 wafers on a longer recipe will result in an error and aborted run on the 3rd wafer. We are just going to have to live with this until we have our other generator back. So until then, please limit the longer runs to 2 wafers max. If you have more than 2 wafers to run on a longer recipe then wait about 5-10 minutes in between batches. |
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The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you. |
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Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time. |
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// [[User:Mehalana v|Vraj Mehalana]] 14:16, 18 September 2024 (PDT) |
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Please use the original tool name on SUM to make all future tool reservations. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool. |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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Please feel free to email me directly with any questions you may have. |
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-Physical card |
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-Mobile phone via Symmetry App |
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Bill Millerski |
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UCSB |
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//[[User:John_d|Demis D. John]] 19:48, 4 February 2025 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase. |
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Two vendors for cleanroom belts we are using are listed here, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests. |
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I will send out an update once we have one. |
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// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC) |
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Latest revision as of 22:23, 10 February 2025
Lab is OPEN
We completed our work early and the lab is now open for use. -- Tony
//Demis D. John 22:23, 10 February 2025 (UTC)
Olympus DSX Microscope: Down
After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. -- Tony Bosch // Demis D. John 20:41, 5 February 2025 (UTC)
Stepper #3 (ASML DUV) - Maint moved to March 3rd
We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. Please plan your work accordingly. // Demis D. John 19:44, 4 February 2025 (UTC)
ICP #2 Maint: Complete
The maintenance is completed and the tool is finishing up an O2 clean run. We are still seeing a 0.04-0.05 Pa actual pressure difference in the software (as before the maint work) which we will address tomorrow, as the tool needs time to reach base pressure. -- Lee Sawyer
//Demis D. John 02:01, 5 February 2025 (UTC)
Oxford ALD+Ion Mill: UP
The tool is useable and in its original condition. If you had a reservation under the previous tool designation it has already been moved over for you.
Chamber 1 is operational and available for use. However, only recipes that run at 300C are to be ran on the tool, as the current thermocouple is only calibrated for that temperature at this time.
Please use the original tool name on SUM to make all future tool reservations.
There is no longer a need for supplemental training. If you have been previously trained on the tool but not received the supplemental training, you can once again reserve and use the tool.
Please feel free to email me directly with any questions you may have.
Thanks Bill Millerski UCSB //Demis D. John 19:48, 4 February 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)