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=====Stepper #3 (ASML DUV) - Tool down=====
===== SignupMonkey + Wiki: Off-Campus Access=====
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey, except for users '''on campus using UCSB Wi-Fi or LAN'''.
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.


If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT)


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
=====MLA Service Complete=====
The FSE has completed their work.


This is hopefully a temporary solution, we will implement other remedies next week.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.


-- Vraj
Tool is available to use.
⚫
// [[User:John_d|Demis D. John]] 03:41, 5 April 2025 (UTC)


=====Unaxis Dep: DOWN=====
⚫
-Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT)
The computer is not coming up, after the campus-wide power outage last week. Will continue to work on it next week.
// [[User:John_d|Demis D. John]] 11:00, 4 April 2025 (UTC)

=====Fluorine ICP: UP=====
We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days.

Thanks,

Aidan
// [[User:John_d|Demis D. John]] 06:39, 3 April 2025 (UTC)

=====EVG - Scheduled downtime=====
I am looking at sending that generator on the week of March 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.

Please let me know if this does not work for you or if you prefer one week over the other.

-Lee
⚫
//[[User:Mehalana v|Vraj Mehalana]] 17:50, 26 March 2025 (UTC)

=====Raith Velion UP=====
Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning.
--Dan
//[[User:Mehalana v|Vraj Mehalana]] 22:27, 1 April 2025 (UTC)

=====New Gowns: Toolbelts purchases=====
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]

// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)


=====Suss SB6-8E=====
=====Suss SB6-8E=====
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.


I will send out an update once we have one.
-Aidan
-Aidan
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)


=====ICP1 Down=====
=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

=====Lab Access Changes: Symmetry App=====
The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

⚫
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)


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Latest revision as of 15:24, 5 April 2025

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey, except for users on campus using UCSB Wi-Fi or LAN.

If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

This is hopefully a temporary solution, we will implement other remedies next week.

-- Vraj // Demis D. John 03:41, 5 April 2025 (UTC)

Unaxis Dep: DOWN

The computer is not coming up, after the campus-wide power outage last week. Will continue to work on it next week. // Demis D. John 11:00, 4 April 2025 (UTC)

Fluorine ICP: UP

We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days.

Thanks,

Aidan // Demis D. John 06:39, 3 April 2025 (UTC)

EVG - Scheduled downtime

I am looking at sending that generator on the week of March 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.

Please let me know if this does not work for you or if you prefer one week over the other.

-Lee //Vraj Mehalana 17:50, 26 March 2025 (UTC)

Raith Velion UP

Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. --Dan //Vraj Mehalana 22:27, 1 April 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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