Template:Announcements: Difference between revisions
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It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). |
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We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage. |
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We will be signing off on the tool tomorrow morning at which point the tool will be available for '''general EBL use to our nanofab community'''. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell |
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=====YES - Scheduled Maint===== |
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===== SignupMonkey + Wiki: Off-Campus Access===== |
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I will be taking the YES down for a PM on Tuesday beginning at 8 am. Since I will be changing out the throttle valve and swapping in our original generator, this could go into Wednesday. Please plan your processing accordingly. |
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Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey. |
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If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab: |
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-Lee |
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https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn |
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-- Vraj |
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=====Lab is Open===== |
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All suits have been pulled and new suits have been put up. All personal items left behind can be found in the boxes in the lobby. |
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Please sign up for your hanger spot. |
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THE LAB IS NOW OPEN FOR BUSINESS |
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Thank you for your patience during shutdown activities. |
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-- [[Peder Lenvik]] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use. |
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Two vendors for cleanroom belts we are using, you may request others: |
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* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist. |
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* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack] |
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// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC) |
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=====KLA P7 Profilometer: Down===== |
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The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days. |
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Thanks |
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Bill Millerski |
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// [[User:John_d|Demis D. John]] 03:30, 3 January 2025 (UTC) |
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=====Oxford ALD+Ion Mill===== |
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Unfortunately Chamber 1 is still down for our Oxford Cluster tool. However we did manage a "work around" to get Chamber 2 and Chamber 3 operational again. The software is in constant error state which does not affect processing on Chamber 2 and Chamber 3. |
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A new tool listing is available in sign up monkey for both these chambers with the word "temporary" or "temp". For the time being users will have to use these "new" tool listings to reserve time on Chamber 2 and Chamber 3. Users will have to go through a quick tutorial with me prior to having access to the tool in order to reserve time slots on sign up monkey. Under NO circumstances are users to use this tool prior to being signed off after being shown how to navigate the software under the current error state. |
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Just to reiterate: |
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1) The tool remains locked out in sign up monkey for the previous tool names |
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2) There is a new tool designation for Chamber 2 & 3 in sign up monkey"Deposition, ALD, Chamber 3 (Oxford FlexAl) Temporary""Dry Etch, Ion Mill (Oxford Flexal) Temp" |
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3) Users need a quick tutorial from me prior to getting tool access. |
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4) Users are not to run the tool until being signed off on the new procedure by staff! Any user caught using the tool without having the updated tool tutorial sign off, will be subject to suspension. |
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5) I will be available at any time during my regular scheduled shift to sign users off. I will be at the tool in the lab for the majority of my work day. |
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-- Bill Millerski |
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//[[User:Mehalana v|Vraj Mehalana]] 23:40, 8 January 2025 (UTC) |
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=====Holography/PL: HeCd Laser Down Mon Dec 16th===== |
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The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th. |
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We will be installing the refurbished laser which will have higher output power. |
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Holography will be unavailable during this time, but all other PL lasers will be available. |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
Latest revision as of 16:28, 2 July 2025
New Raith EBL: tool up
It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.
We will be signing off on the tool tomorrow morning at which point the tool will be available for general EBL use to our nanofab community. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell // Demis D. John 16:28, 2 July 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)