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=====Fluorine ICP: DOWN=====
===== SignupMonkey + Wiki: Off-Campus Access=====
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey, except for users '''on campus using UCSB Wi-Fi or LAN'''.
Hello All,


If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week.


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
Tony
⚫
// [[User:John_d|Demis D. John]] 15:25, 29 March 2025 (UTC)


This is hopefully a temporary solution, we will implement other remedies next week.
⚫
=====Lab Open=====
Hello All,


-- Vraj
Following the campus-wide power shutoff,
⚫
// [[User:John_d|Demis D. John]] 03:41, 5 April 2025 (UTC)
The fab is open but the following equipment still has lingering issues:


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=====Unaxis Dep: DOWN=====
# Unaxis ICP-PECVD - Main computer is not coming up
The computer is not coming up, after the campus-wide power outage last week. Will continue to work on it next week.
# ALD/CAIBE - All chambers down. Bill is still working on it.
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// [[User:John_d|Demis D. John]] 11:00, 4 April 2025 (UTC)
# Fluorine Etcher - Will remain down until it can be addressed Monday.
# EB3 - Cryo regen failed, on second regen so should come up later.
# GCA Autostep - Having computer issues.
# The ALD/CABE and EB3 have a more than fair chance of coming back up today.


⚫
=====Fluorine ICP: UP=====
Bill will have those updates along with the status of the Autostep.
We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days.


Thanks,
The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.


Aidan
Best,
⚫
// [[User:John_d|Demis D. John]] 06:39, 3 April 2025 (UTC)
Tony Bosch
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// [[User:John_d|Demis D. John]] 21:37, 28 March 2025 (UTC)

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=====RIE #5 is up=====
We found a burnt wire in the system controller. System is ready to use.
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//[[User:Mehalana v|Vraj Mehalana]] 17:51, 26 March 2025 (UTC)


=====EVG - Scheduled downtime=====
=====EVG - Scheduled downtime=====
I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.
I am looking at sending that generator on the week of March 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.


Please let me know if this does not work for you or if you prefer one week over the other.
Please let me know if this does not work for you or if you prefer one week over the other.

Latest revision as of 15:24, 5 April 2025

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website, including both the Nanofab Wiki and Signupmonkey, except for users on campus using UCSB Wi-Fi or LAN.

If you are off-campus, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

This is hopefully a temporary solution, we will implement other remedies next week.

-- Vraj // Demis D. John 03:41, 5 April 2025 (UTC)

Unaxis Dep: DOWN

The computer is not coming up, after the campus-wide power outage last week. Will continue to work on it next week. // Demis D. John 11:00, 4 April 2025 (UTC)

Fluorine ICP: UP

We finally got the slit valve assemble to seal correctly after making a number of mechanical adjustments. The tool is currently running an O2 clean and should be available to use within the next 10-15 minutes. Please let us know if you encounter any issues. The load lock seems like it's taking a while to get down to 0mT but that could just be a product of being open for the past several days.

Thanks,

Aidan // Demis D. John 06:39, 3 April 2025 (UTC)

EVG - Scheduled downtime

I am looking at sending that generator on the week of March 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.

Please let me know if this does not work for you or if you prefer one week over the other.

-Lee //Vraj Mehalana 17:50, 26 March 2025 (UTC)

Raith Velion UP

Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. --Dan //Vraj Mehalana 22:27, 1 April 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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