Thermal Evaporation Recipes

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Thermal Evaporator 1

Materials Table

Materials Table for Thermal Evaporator #1
Material	Symbol	Density, g/cm3	Z Ratio	Tooling, %	Current, Amp	Dep.rate, A/sec	Comments
Aluminum	Al	2.70	8.17	95	85	1	Used often
Chromium	Cr	7.20	28.95	95	85	2	Used often
Cobalt	Co	8.71	25.74
Copper	Cu	8.93	20.21	100			Used often
Gold	Au	19.32	23.18	101.2	122	5	Used often
Gold/Palladium	Au.5/Pd.5	15.86	23.96
Gold/Palladium	Au.5/Pd.4	16.40	23.80
Gold/Zinc	Au.95/Zn.05	18.72	22.89	101.2
Gold/Zinc	Au.90/Zn.10	18.07	22.58
Magnezium	Mg	1.74	5.48	98.4
Manganese	Mn	7.20	23.40	120	100
Nickel	Ni	8.90	26.68	100	50	4.5	Used often
Nichrome	NiCr	8.32	27.59		100	0.4
Palladium	Pd	12.40	24.73	140.5	62	1.5	Used often
Silicon Monoxide	SiO	2.13	10.19	120	70
Silver	Ag	10.5	16.69
Zinc	Zn	7.14	17.18		50	4.5	Used often
Zinc Oxide	ZnO	5.61	15.88
Strontium Fluoride	SrF2	4.28	12.15	200
Iron	Fe	7.86	25.30
ITO(IndiumTinOxide)	In2O3 - SnO2	6.43-7.14	0.841
Permalloy	Ni0.1Fe0.2	8.7	26.40		140	0.1

Thermal Evaporator 2

Materials Table

Materials Table for Thermal Evaporator #2
Material	Symbol	Density, g/cm3	Z Ratio	Tooling, %	Comments
Aluminum	Al	2.70	1.08
Antimony	Sb	6.620	0.768
Arsenic	As	5.73	0.996
Beryllium	Be	1.85	0.543
Boron	B	2.54	0.389
Cadmium	Cd	8.64	0.682
Cadmium sulfide	CdS	4.83	1.02
Cadmium telluride	CdTe	5.85	0.980
Calcium fluoride	CaF2	3.18	0.775		Used often
Carbon (graphite)	C	2.25	3.26
Chromium	Cr	7.20	0.305	155	Used often
Cobalt	Co	8.71	0.343
Copper	Cu	8.93	0.437
Gallium	Ga	5.93	0.593
Gallium Arsenide	GaAs	5.31	1.59
Germanium	Ge	5.35	0.516
Gold	Au	19.30	0.381		Used often
Indium	In	7.30	0.841	120	Used often, tooling factor needs adjustment
Indium antimonide	InSb	5.76	0.769
Iridium	Ir	22.4	0.129
Iron	Fe	7.86	0.349
Lead	Pb	11.3	1.13
Lead sulfide	PbS	7.50	0.566
Lithium fluoride	LiF	2.638	0.778
Magnesium	Mg	1.74	1.61
Magnesium oxide	MgO	3.58	0.411
Magnesium Fluoride	MgF2	3.00 ( should be 3.18)	0.427( should be 0.637)
Manganese	Mn	7.20	0.377
Manganese(II) Sulfide	MnS	3.99	0.94
Mercury	Hg	13.46	0.74
Molybdenum	Mo	10.2	0.257
Nickel	Ni	8.91	0.331		Used often
Niobium	Nb	8.578	0.492
Niobium(V) Oxide	Nb2O5	4.47	*1.00		*z ratio has not been established
Palladium	Pd	12.0	0.357
Platinum	Pt	21.4	0.245
Potasium Cloride	KCl	1.98	2.05
Selenium	Se	4.82	0.864
Silicon	Si	2.32	0.712
Silicon(II) Oxide	SiO	2.13	0.87
Silicon dioxide (fused quarz)	SiO2	2.20	1.07
Silver	Ag	10.5	0.529
Silver bromide	AgBr	6.47	1.18
Silver chloride	AgCl	5.56	1.32
Sodium	Na	0.97	4.8
Sodium chloride	NaCl	2.17	1.57
Tantalum	Ta	16.6	0.262
Tantalum(IV) oxide	Ta2O5	8.2	0.30
Tin	Sn	7.30	0.724	197	Program #9, Tooling factor=200%, cold fixture
Titanium	Ti	4.50	0.628		Used often
Titanium (IV) Oxide	TiO2	4.26	0.40
Titanium Oxide	TiO	4.90	*1.00		* z ratio not established
Tungsten	W	19.3	0.163
Tungsten carbide	WC	15.6	0.151
Zinc	Zn	7.04	0.514		Used often
Zinc Oxide	ZnO	5.61	0.556
Zinc Sulfide	ZnS	4.09	0.775
Zirconium	Zr	6.51	0.60		Should be 6.49
Zirconium Oxide	ZrO2	5.6	1.001

In Deposition (Thermal Evaporator 2)

• Indium evaporation Data