Thermal Evaporation Recipes: Difference between revisions
Jump to navigation
Jump to search
m (moved In to bottom of table) |
|||
| (10 intermediate revisions by 2 users not shown) | |||
| Line 3: | Line 3: | ||
=[[Thermal Evaporator 1]]= |
=[[Thermal Evaporator 1]]= |
||
=Materials Table= |
==Materials Table== |
||
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
||
| Line 200: | Line 200: | ||
|ITO(IndiumTinOxide) |
|ITO(IndiumTinOxide) |
||
|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2 |
|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2 |
||
| |
|6.43-7.14 |
||
|0.841 |
|0.841 |
||
| |
| |
||
| Line 208: | Line 208: | ||
|- |
|- |
||
|Permalloy |
|Permalloy |
||
|Ni<sub>0. |
|Ni<sub>0.1</sub>Fe<sub>0.2</sub> |
||
|8.7 |
|8.7 |
||
|26.40 |
|26.40 |
||
| Line 215: | Line 215: | ||
|0.1 |
|0.1 |
||
| |
| |
||
| |
|} |
||
=[[Thermal Evaporator 2]]= |
=[[Thermal Evaporator 2]]= |
||
= Materials Table = |
== Materials Table == |
||
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
||
| Line 644: | Line 644: | ||
| |
| |
||
| |
| |
||
| |
|} |
||
== In Deposition (Thermal Evaporator 2) == |
|||
*[[media:Thermal evaporator 2-new Sheet1.pdf|Indium evaporation Data]] |
|||
Latest revision as of 00:00, 27 June 2018
Back to Vacuum Deposition Recipes.
Thermal Evaporator 1
Materials Table
Materials Table for Thermal Evaporator #1
| |||||||
|---|---|---|---|---|---|---|---|
| Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Current, Amp | Dep.rate, A/sec | Comments |
| Aluminum | Al | 2.70 | 8.17 | 95 | 85 | 1 | Used often |
| Chromium | Cr | 7.20 | 28.95 | 95 | 85 | 2 | Used often |
| Cobalt | Co | 8.71 | 25.74 | ||||
| Copper | Cu | 8.93 | 20.21 | 100 | Used often | ||
| Gold | Au | 19.32 | 23.18 | 101.2 | 122 | 5 | Used often |
| Gold/Palladium | Au.5/Pd.5 | 15.86 | 23.96 | ||||
| Gold/Palladium | Au.5/Pd.4 | 16.40 | 23.80 | ||||
| Gold/Zinc | Au.95/Zn.05 | 18.72 | 22.89 | 101.2 | |||
| Gold/Zinc | Au.90/Zn.10 | 18.07 | 22.58 | ||||
| Magnezium | Mg | 1.74 | 5.48 | 98.4 | |||
| Manganese | Mn | 7.20 | 23.40 | 120 | 100 | ||
| Nickel | Ni | 8.90 | 26.68 | 100 | 50 | 4.5 | Used often |
| Nichrome | NiCr | 8.32 | 27.59 | 100 | 0.4 | ||
| Palladium | Pd | 12.40 | 24.73 | 140.5 | 62 | 1.5 | Used often |
| Silicon Monoxide | SiO | 2.13 | 10.19 | 120 | 70 | ||
| Silver | Ag | 10.5 | 16.69 | ||||
| Zinc | Zn | 7.14 | 17.18 | 50 | 4.5 | Used often | |
| Zinc Oxide | ZnO | 5.61 | 15.88 | ||||
| Strontium Fluoride | SrF2 | 4.28 | 12.15 | 200 | |||
| Iron | Fe | 7.86 | 25.30 | ||||
| ITO(IndiumTinOxide) | In2O3 - SnO2 | 6.43-7.14 | 0.841 | ||||
| Permalloy | Ni0.1Fe0.2 | 8.7 | 26.40 | 140 | 0.1 | ||
Thermal Evaporator 2
Materials Table
Materials Table for Thermal Evaporator #2
| |||||
|---|---|---|---|---|---|
| Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Comments |
| Aluminum | Al | 2.70 | 1.08 | ||
| Antimony | Sb | 6.620 | 0.768 | ||
| Arsenic | As | 5.73 | 0.996 | ||
| Beryllium | Be | 1.85 | 0.543 | ||
| Boron | B | 2.54 | 0.389 | ||
| Cadmium | Cd | 8.64 | 0.682 | ||
| Cadmium sulfide | CdS | 4.83 | 1.02 | ||
| Cadmium telluride | CdTe | 5.85 | 0.980 | ||
| Calcium fluoride | CaF2 | 3.18 | 0.775 | Used often | |
| Carbon (graphite) | C | 2.25 | 3.26 | ||
| Chromium | Cr | 7.20 | 0.305 | 155 | Used often |
| Cobalt | Co | 8.71 | 0.343 | ||
| Copper | Cu | 8.93 | 0.437 | ||
| Gallium | Ga | 5.93 | 0.593 | ||
| Gallium Arsenide | GaAs | 5.31 | 1.59 | ||
| Germanium | Ge | 5.35 | 0.516 | ||
| Gold | Au | 19.30 | 0.381 | Used often | |
| Indium | In | 7.30 | 0.841 | 120 | Used often |
| Indium antimonide | InSb | 5.76 | 0.769 | ||
| Iridium | Ir | 22.4 | 0.129 | ||
| Iron | Fe | 7.86 | 0.349 | ||
| Lead | Pb | 11.3 | 1.13 | ||
| Lead sulfide | PbS | 7.50 | 0.566 | ||
| Lithium fluoride | LiF | 2.638 | 0.778 | ||
| Magnesium | Mg | 1.74 | 1.61 | ||
| Magnesium oxide | MgO | 3.58 | 0.411 | ||
| Magnesium Fluoride | MgF2 | 3.00 ( should be 3.18) | 0.427( should be 0.637) | ||
| Manganese | Mn | 7.20 | 0.377 | ||
| Manganese(II) Sulfide | MnS | 3.99 | 0.94 | ||
| Mercury | Hg | 13.46 | 0.74 | ||
| Molybdenum | Mo | 10.2 | 0.257 | ||
| Nickel | Ni | 8.91 | 0.331 | Used often | |
| Niobium | Nb | 8.578 | 0.492 | ||
| Niobium(V) Oxide | Nb2O5 | 4.47 | *1.00 | *z ratio has not been established | |
| Palladium | Pd | 12.0 | 0.357 | ||
| Platinum | Pt | 21.4 | 0.245 | ||
| Potasium Cloride | KCl | 1.98 | 2.05 | ||
| Selenium | Se | 4.82 | 0.864 | ||
| Silicon | Si | 2.32 | 0.712 | ||
| Silicon(II) Oxide | SiO | 2.13 | 0.87 | ||
| Silicon dioxide (fused quarz) | SiO2 | 2.20 | 1.07 | ||
| Silver | Ag | 10.5 | 0.529 | ||
| Silver bromide | AgBr | 6.47 | 1.18 | ||
| Silver chloride | AgCl | 5.56 | 1.32 | ||
| Sodium | Na | 0.97 | 4.8 | ||
| Sodium chloride | NaCl | 2.17 | 1.57 | ||
| Tantalum | Ta | 16.6 | 0.262 | ||
| Tantalum(IV) oxide | Ta2O5 | 8.2 | 0.30 | ||
| Tin | Sn | 7.30 | 0.724 | Used often | |
| Titanium | Ti | 4.50 | 0.628 | Used often | |
| Titanium (IV) Oxide | TiO2 | 4.26 | 0.40 | ||
| Titanium Oxide | TiO | 4.90 | *1.00 | * z ratio not established | |
| Tungsten | W | 19.3 | 0.163 | ||
| Tungsten carbide | WC | 15.6 | 0.151 | ||
| Zinc | Zn | 7.04 | 0.514 | Used often | |
| Zinc Oxide | ZnO | 5.61 | 0.556 | ||
| Zinc Sulfide | ZnS | 4.09 | 0.775 | ||
| Zirconium | Zr | 6.51 | 0.60 | Should be 6.49 | |
| Zirconium Oxide | ZrO2 | 5.6 | 1.001 | ||