Other Dry Etching Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
Line 11: Line 11:
*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Au Etch Recipe]]
*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Au Etch Recipe]]
*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Ni Etch Recipe]]
*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Ni Etch Recipe]]

=[Misc]=

Revision as of 22:35, 16 December 2015