High Temp Oven (Blue M): Difference between revisions
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}}The Blue M oven has a Nitrogen purge and is |
}}The Blue M oven has a Nitrogen purge and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled. |
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Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
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Revision as of 02:58, 9 September 2017
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The Blue M oven has a Nitrogen purge and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.