ASML 5500: Recovering from an Error: Difference between revisions
Jump to navigation
Jump to search
(initial, copied from "recover from reticle ID typo") |
(explained that wafers will be transferred thru stepper) |
||
| Line 2: | Line 2: | ||
## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot. |
## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot. |
||
# Abort the Batch: Choose the task from the Task List, click Batch > "Abort" |
# Abort the Batch: Choose the task from the Task List, click Batch > "Abort" |
||
# In the following popup window, click "Remove |
# In the following popup window, click "Remove Wafers from Litho Cluster" |
||
## This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. |
|||
# Wait for the task status to change from "Aborting" to "Aborted" |
# Wait for the task status to change from "Aborting" to "Aborted" |
||
Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list. |
Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. |
||
Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job! |
|||
Revision as of 06:58, 21 March 2018
- Do NOT exit task streaming!
- If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
- Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
- In the following popup window, click "Remove Wafers from Litho Cluster"
- This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure.
- Wait for the task status to change from "Aborting" to "Aborted"
Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.
Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job!