Template:Announcements: Difference between revisions
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===== PECVD#2: Down, Retraining required ===== |
===== PECVD#2: Down, Retraining required ===== |
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The Plasma Therm Cortex software update is complete, and the system is operational. |
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. Training will be announced soon. |
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If everything goes well with particulates, and film quality, we will start training sessions early next week. |
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===== Stepper #2 AutoStep: UP ===== |
===== Stepper #2 AutoStep: UP ===== |
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Revision as of 23:34, 10 May 2018
UCSB NanoFab Announcements
JEOL SEM #2: Up
The transfer rod has been replaced. Please be sure to insert the rod slowly and carefully to ensure it doesn't get damaged again. If any resistance, rotate left and right while maintaining forward pressure and it will smoothly work through the o-rings. // John d 15:02, 30 April 2018 (PDT)
RIE#5 Up, SiCl4 now available
SiCl4 is available for use. We tried a new line heater on the SiCl4 and that seemed to do the trick. The system is still pumping slow but is getting better. // John d 15:00, 27 April 2018 (PDT)
PECVD#2: Down, Retraining required
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. Training will be announced soon. // John d 16:48, 10 May 2018 (PDT)
Stepper #2 AutoStep: UP
One RMS motor and motor control board was replaced. I ran setup without error. The system is up and ready for your use. // John d 12:50, 25 April 2018 (PDT)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)