Template:Announcements: Difference between revisions
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<!------------- Announcements ----------------> |
<!------------- Announcements ----------------> |
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===== Stepper #2: Down until Mon Morning ===== |
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It's been reported that the load arm is malfunctioning and recovery |
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The transfer rod has been replaced. Please be sure to insert the rod |
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steps are not working. I will take a look at the tool Monday morning. |
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slowly and carefully to ensure it doesn't get damaged again. If any |
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The system is down until further notice. |
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resistance, rotate left and right while maintaining forward pressure |
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and it will smoothly work through the o-rings. |
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===== RIE#5 Up, SiCl4 now available ===== |
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SiCl4 is available for use. We tried a new line heater on the SiCl4 and that seemed to do the trick. The system is still pumping slow but is getting better. |
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// [[User:John d|John d]] 15:00, 27 April 2018 (PDT) |
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===== PECVD#2: Open Soon ===== |
===== PECVD#2: Open Soon ===== |
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Revision as of 02:23, 13 May 2018
UCSB NanoFab Announcements
Stepper #2: Down until Mon Morning
It's been reported that the load arm is malfunctioning and recovery steps are not working. I will take a look at the tool Monday morning. The system is down until further notice. // John d 19:23, 12 May 2018 (PDT)
PECVD#2: Open Soon
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. Software has a few issues being worked out. Training will be announced soon. // Thibeault 16:37, 10 May 2018 (PDT)