Difference between revisions of "ASML Stepper 3 - UCSB Test Reticles"
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1.0mm margin on all sides |
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[[File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png|frameless|115x115px]] |
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with 1.1mm margin on all sides |
with 1.1mm margin on all sides |
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Revision as of 17:31, 1 August 2018
Reticle ID: "UCSB-OPC1"
This reticle is always installed in the system, in the "System Reticles" Box #1.
Alignment Markers
Resolution Test Charts
The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.
In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_...
patterns are for calibrating the OPC algorithm, and are not for user analysis.
Calibration Chart Layout
Cell name is "UCSB_Cal", with coordinates below pointing to center of this cell.
Resolution Chart Schematic
"resolution_chart_ORIG" cell in the above.
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:
Coords for "UCSB_Cal" Calibration Patterns
Each of the above "UCSB_Cal" cells, including all 7 patterns, is repeated on the following coordinates across the plate (coords are to the center of the "UCSB_Cal" cell):
Image Size
X , Y (Wafer, mm) |
Image Shift
X (Wafer, mm) |
Image Shift
Y (Wafer, mm) |
---|---|---|
2.610000 , 2.610000 | -9.450000 | 12.150000 |
same as above | -6.750000 | 12.150000 |
" " | -4.050000 | 12.150000 |
" " | -1.350000 | 12.150000 |
" " | 1.350000 | 12.150000 |
" " | 4.050000 | 12.150000 |
" " | 6.750000 | 12.150000 |
" " | 9.450000 | 12.150000 |
-9.450000 | 9.450000 | |
Alignment Marker | ||
-4.050000 | 9.450000 | |
-1.350000 | 9.450000 | |
1.350000 | 9.450000 | |
4.050000 | 9.450000 | |
Alignment Marker | ||
9.450000 | 9.450000 | |
-9.450000 | 6.750000 | |
-6.750000 | 6.750000 | |
-4.050000 | 6.750000 | |
-1.350000 | 6.750000 | |
1.350000 | 6.750000 | |
4.050000 | 6.750000 | |
6.750000 | 6.750000 | |
9.450000 | 6.750000 | |
-9.450000 | 4.050000 | |
-6.750000 | 4.050000 | |
-4.050000 | 4.050000 | |
-1.350000 | 4.050000 | |
1.350000 | 4.050000 | |
4.050000 | 4.050000 | |
6.750000 | 4.050000 | |
9.450000 | 4.050000 | |
-9.450000 | 1.350000 | |
-6.750000 | 1.350000 | |
-4.050000 | 1.350000 | |
-1.350000 | 1.350000 | |
1.350000 | 1.350000 | |
4.050000 | 1.350000 | |
6.750000 | 1.350000 | |
9.450000 | 1.350000 | |
-9.450000 | -1.350000 | |
-6.750000 | -1.350000 | |
-4.050000 | -1.350000 | |
-1.350000 | -1.350000 | |
1.350000 | -1.350000 | |
4.050000 | -1.350000 | |
6.750000 | -1.350000 | |
9.450000 | -1.350000 | |
-9.450000 | -4.050000 | |
-6.750000 | -4.050000 | |
-4.050000 | -4.050000 | |
-1.350000 | -4.050000 | |
1.350000 | -4.050000 | |
4.050000 | -4.050000 | |
6.750000 | -4.050000 | |
9.450000 | -4.050000 | |
-9.450000 | -6.750000 | |
-6.750000 | -6.750000 | |
-4.050000 | -6.750000 | |
-1.350000 | -6.750000 | |
1.350000 | -6.750000 | |
4.050000 | -6.750000 | |
6.750000 | -6.750000 | |
9.450000 | -6.750000 | |
-9.450000 | -9.450000 | |
Alignment Marker | ||
-4.050000 | -9.450000 | |
-1.350000 | -9.450000 | |
1.350000 | -9.450000 | |
4.050000 | -9.450000 | |
Alignment Marker | ||
9.450000 | -9.450000 | |
-9.450000 | -12.150000 | |
-6.750000 | -12.150000 | |
-4.050000 | -12.150000 | |
-1.350000 | -12.150000 | |
1.350000 | -12.150000 | |
4.050000 | -12.150000 | |
6.750000 | -12.150000 | |
9.450000 | -12.150000 |