Surface Analysis (KLA/Tencor Surfscan): Difference between revisions

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*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]]
*[[media:Surfscan-Operation-Manual.pdf|Operations Manual]]
**''For detailed measurement info, it is highly recommended that you read the manual.''
**''For detailed measurement info, it is highly recommended that you read the manual.''
*[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]]
*[[media:Surfscan-Surfscan 6200 info.pdf|Surfscan Info]][[File:UCSBTEST.png|left|thumb|'''UCSBTEST2''' for big size particles '''(1.6-28.0)um''']][[File:UCSBTEST2 for small particles.png|left|thumb|'''UCSBTEST2''' for small size particles '''(0.16-1.6)um''']]
*[[Standard recipes]][[File:UCSBTEST.png|left|thumb|'''UCSBTEST2''' for big size particles '''(1.6-28.0)um''']][[File:UCSBTEST2 for small particles.png|left|thumb|'''UCSBTEST2''' for small size particles '''(0.16-1.6)um''']]

Revision as of 21:40, 26 March 2019

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Tool Type Inspection, Test and Characterization
Location Bay 5
Supervisor Biljana Stamenic
Supervisor Phone (805) 893-4002
Supervisor E-Mail biljana@ece.ucsb.edu
Description Surface Analysis 
KLA/Tencor Surfscan
Manufacturer Tencor


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 6 inches.

Documentation

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