Difference between revisions of "Dry Etching Recipes"
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(Oxford links to GaN+GaAs recipes) |
(added Nb, Os rows, "A" for Pan1/2) |
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! bgcolor="#d0e7ff" align="center" |Ni |
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|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}} |
|{{rl|Other Dry Etching Recipes|Other Dry Etch (CAIBE (Oxford Ion Mill))}} |
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! bgcolor="#d0e7ff" align="center" |Pt |
! bgcolor="#d0e7ff" align="center" |Pt |
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|{{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}} |
|{{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}} |
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|[[ICP Etching Recipes#GaN Etch .28Oxford ICP Etcher.29|R]] |
|[[ICP Etching Recipes#GaN Etch .28Oxford ICP Etcher.29|R]] |
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|{{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}} |
|{{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}} |
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+ | |[[ICP Etching Recipes#Ru .28Ruthenium.29 Etch .28Panasonic 2.29|R]] |
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Revision as of 23:31, 19 April 2022
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.