Difference between revisions of "Thermal Evap 2 (Solder)"
Jump to navigation
Jump to search
(→About) |
|||
Line 11: | Line 11: | ||
= About = |
= About = |
||
− | |||
− | =Detailed Specifications= |
||
− | *Standard 18" bell jar pumped by 8" Varian cryopump (HV8) driven by Ebara 2.1 compressor |
||
− | *Low E-7 Torr ultimate pressure |
||
− | *Rate Monitor: Maxtek TM-300 |
||
− | *Typical material rates: Al - 1 A/s @ 85 amps |
||
− | **Au - 5 A/s @ 122 amps |
||
− | **Cr - 2 A/s @ 85 amps |
||
− | **Zn - 4.5 A/s @ 50 amps |
||
= Materials Table = |
= Materials Table = |
Revision as of 16:08, 28 August 2012
|
About
Materials Table
Materials Table
| |||||||
---|---|---|---|---|---|---|---|
Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Current, Amp | Dep.rate, A/sec | Comments |