Sputtering Recipes: Difference between revisions
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==Ta{{sub|2}}O{{sub|5}} deposition (IBD)== |
==Ta{{sub|2}}O{{sub|5}} deposition (IBD)== |
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*{{fl|IBD-Ta2O5-Recipe.pdf|Ta{{sub|2}}O{{sub|5}} dep}} |
*{{fl|IBD-Ta2O5-Recipe.pdf|Ta{{sub|2}}O{{sub|5}} dep}} |
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==TiO{{sub|2}} deposition (IBD)== |
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*{{fl|IBD-TiO2-Recipe.pdf|TiO{{sub|2}} dep}} |
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Revision as of 16:03, 1 October 2012
Back to Vacuum Deposition Recipes.