Vacuum Deposition Recipes: Difference between revisions

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<big>Y = Recipe, A = Avaliable</big>
<big>Y = Recipe, A = Avaliable</big>


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! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
! width="1675" height="45" colspan="18" | <div style="font-size: 150%;">Vacuum Deposition Recipes</div>
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! bgcolor="#D0E7FF" align="center" | Ag
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| bgcolor="EEFFFF" | {{Al/E1}}
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! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
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! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
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| bgcolor="EEFFFF" | {{rl|Atomic Layer Deposition Recipes|ZrO2 deposition (ALD)}}
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! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="20" bgcolor="#D0E7FF" align="center" | '''Material'''

Revision as of 18:21, 7 September 2012

Y = Recipe, A = Avaliable


Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Tool) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Molecular Vapor Deposition (Tool)
Ag A
A A












Al A
A A












Al2O3 A A












R1
AlN














R1
Au A
A A












B
















Co


A












Cr


A












Cu
















Fe


A












Ge A
A A












GeO2
Hf


A












HfO2














R1
In
















Ir


A












ITO
A














MgO
Mo
















Nb
















Ni A
A A












NiCr
NiFe
Pd A
A A












Pt A
A A












Ru


A












Si
A A













SiN A







R1

R1 R1 R1

SiO2
A






R1

R1 R1 R1 R1
SiOxNy
A














Sn
















SrF2
A














Ta
















Ta2O5


A




R1






Ti A
A A












TiN
















TiO2
A














V
















W
















Zn
















ZnO2
















Zr


A












ZrO2














R1
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Tool) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Molecular Vapor Deposition (Tool)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=2500"