Tube Furnace (Tystar 8300): Difference between revisions
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# General furnace annealing - Tube 3 |
# General furnace annealing - Tube 3 |
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Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O<sub>2</sub>, Steam from DI-H<sub>2</sub>O, N<sub>2</sub>. |
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=Process Information= |
=Process Information= |
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Revision as of 20:35, 18 March 2014
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About
The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:
- SOG curing - Tube 1
- Dry or wet oxidation of silicon - Tubes 2 and 3
- General furnace annealing - Tube 3
Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O2, Steam from DI-H2O, N2.
Process Information
Recipes
Useful Information
Tystar Wafer Boat Drawing - 4" Wafer with 0.5mm Slots
See Also
- Tystar - Manufacturer of the tool
- Silicon Thermal Oxide Thickness Calculator - Use this on-line calculator to calculate times for silicon oxidation.