Tony Bosch

Tony Bosch Position Senior Equipment Engineer Room Number 1109C Phone (805) 839-3486 E-Mail bosch@ece.ucsb.edu

About

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Tools

Tony Bosch is the supervisor for the following tools.

Sputter 3 (AJA ATC 2000-F) Sputter 4 (AJA ATC 2200-V) Sputter 5 (AJA ATC 2200-V) ICP-PECVD (Unaxis VLR) ICP-Etch (Unaxis VLR) Oxford ICP Etcher (PlasmaPro 100 Cobra) Gold Plating Bench ICP Etch 2 (Panasonic E640)

Tube Furnace (Tystar 8300) Tube Furnace AlGaAs Oxidation (Linberg) Flip-Chip Bonder (Finetech) Deep UV Optical Microscope (Olympus) Laser Scanning Confocal M-scope (Olympus LEXT) Automated Coat/Develop System (S-Cubed Flexi) DSEIII (PlasmaTherm/Deep Silicon Etcher) Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)